Charged particle beam irradiation device and charged particle beam irradiation method

Abstract

A charged particle beam irradiation apparatus and a charged particle beam irradiation method are provided, capable of appropriately restarting the depiction of samples that have abnormally terminated. The charged particle beam irradiation apparatus includes: a deflector; a firing data generation unit that generates firing data including firing numbers of the charged particle beam; a deflection control unit that controls the deflection of the charged particle beam; a platform control unit; an irradiation control unit that controls the irradiation of the charged particle beam based on the firing data; a memory control unit that, when the irradiation of the charged particle beam stops due to an abnormality occurring in a component other than the irradiation control unit, stores at least one firing number at the time of irradiation stop in a memory unit, wherein the component other than the irradiation control unit includes at least one of the firing data generation unit, the deflection control unit, and the platform control unit; and an irradiation control unit that, when the conditions for restarting irradiation are met, restarts irradiation from the next firing number after the firing number at the time of irradiation stop stored in the memory unit.

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