Rapid mode switching of charged-particle-beam devices

TW202640692APending Publication Date: 2026-10-01FEI CO
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Patent Information

Application Number
TW115104882
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-07
Filing Date
2026-02-06
Publication Date
2026-10-01

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Abstract

A method, within a charged particle beam (CPB) microscope, of rapidly switching between a first imaging or data acquisition mode and a second imaging or data acquisition mode, comprises: activating a switchable electrostatic multipole of the CPB microscope to either cause or enable the CPB microscope to generate a first set of one or more images or data sets, the first set of one or more images or data sets comprising information relating to a sample in accordance with the first imaging or data acquisition mode; and de-activating the switchable electrostatic multipole to either cause or enable the CPB microscope to generate a second set of one or more images or data sets, the second set of one or more images or data sets comprising information relating to the sample in accordance with the second imaging or data acquisition mode.
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