Ion filter and ground plate stack

Abstract

Embodiments described herein generally relate to a substrate processing apparatus, and more specifically to improved ground plate and ion blocker designs. In at least one embodiment, a ground plate stack is provided. The ground plate stack includes a ground plate including one or more first apertures disposed therethrough, an ion blocker plate disposed below the ground plate and including one or more second apertures disposed therethrough, a thickness of the ion blocker plate being less than a thickness of the ground plate, where the one or more first apertures of the ground plate are misaligned with the one or more second apertures of the ion blocker plate, and a plenum disposed between the ground plate and the ion blocker plate.

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