Modular laser system

TW202640793APending Publication Date: 2026-10-01ASML NETHERLANDS BV
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Patent Information

Application Number
TW114147641
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-06
Filing Date
2025-12-05
Publication Date
2026-10-01

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Abstract

A modular laser system comprises a docking system and at least one laser module. The docking system comprises: a frame; a plurality of docks provided on the frame each of the plurality of docks being for releasable engagement with a laser module; and combining optics disposed within the frame. Each laser module is operable to generate a radiation beam and output the laser beam through an output of the laser module, each laser module releasably engaged with a different one of the plurality of docks. The combining optics combines the laser beams from the laser modules to form a single output radiation beam. Each of the plurality of docks is provided with a safety component to block radiation from propagating out of the frame through the window of that dock.
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