MEMS microphone

Abstract

According to the present embodiment, a MEMS microphone includes a first substrate; a second substrate disposed on the first substrate; an adhesive layer disposed between the first substrate and the second substrate; a MEMS structure disposed on the second substrate; a signal processing element disposed on the second substrate and spaced apart from the MEMS structure; and a capacitor disposed spaced apart from the MEMS structure and the signal processing element, in which the capacitor includes a first external electrode and a second external electrode disposed at opposite ends, a plurality of internal electrodes and a dielectric layer disposed between the first and second external electrodes, the first substrate, the second substrate, and the MEMS structure are stacked in a first direction, and the plurality of internal electrodes being stacked in a second direction perpendicular to the first direction.

Images