Antioxidant devices for electronic components

Abstract

[Problem] How to prevent the reformation of oxide film on bumps with a small amount of inert gas without increasing the size of the device? [Solution] The present invention relates to an anti-oxidation device (transfer device 6) for removing oxide film from bumps B of electronic component 1 by irradiating them with plasma. It comprises: a holding head 31 having an outlet 36b for ejecting inert gas at a position adjacent to the electronic component 1; and a moving means 32 for moving the holding head 31. An irradiation section 37 of the plasma irradiation means 33 is provided between a receiving position (transfer table 13) and a transfer position (the mounting section 34A of the relay table 34), and has opposing surfaces (flange surface 38a, mounting surface 34b) from the irradiation section 37 to the transfer position. The moving means 32 moves the bump B of the electronic component 1 held by the holding head 31 towards the opposing surface, during which inert gas is continuously ejected from the outlet 36b to form an inert gas environment between the electronic component 1 and the opposing surface. none

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