Composite substrate, device, and method for manufacturing composite substrate

Abstract

The purpose of this invention is to provide a composite substrate, etc., that is less prone to cracking, damage, peeling, etc., even when beveling, during the polishing of the functional layer. The solution is a composite substrate 1, which is a composite substrate 1 having a functional layer 21a and a support substrate 23 supporting the functional layer 21a. The composite substrate 1 has a beveling area 12 on its outer periphery. Through the beveling area 12, the outer periphery of the effective area 13 outside the beveling area 12 forms a shape including an arc-shaped arc portion 131, a straight line portion 132, and a relay portion 133 connecting the arc portion 131 and the straight line portion 132. The relay portion 133 is formed by extending the curve of the arc portion 131 and extending the straight line of the straight line portion 132.

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