Substrate processing device

TW202641227APending Publication Date: 2026-10-01SCREEN HOLDINGS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW115107049
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-18
Filing Date
2026-02-26
Publication Date
2026-10-01

Smart Images

  • Figure TWG2TA001079420_001
    Figure TWG2TA001079420_001
  • Figure TWG2TA001079420_002
    Figure TWG2TA001079420_002
  • Figure TWG2TA001079420_003
    Figure TWG2TA001079420_003
Patent Text Reader

Abstract

Provided is a substrate processing device capable of uniformizing the pressing force exerted during cleaning of a substrate even when deflection or deformation of the substrate occurs. Included are a plurality of brush bodies
Need to check novelty before this filing date? Find Prior Art