Controlling temperature uniformity of a wafer using a wafer pedestal shielding element
TW202641244APending Publication Date: 2026-10-01APPLIED MATERIALS INC
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW114137156
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-12
- Filing Date
- 2025-09-26
- Publication Date
- 2026-10-01
Smart Images
Figure TWG2TA001078317_001 
Figure TWG2TA001078317_002 
Figure TWG2TA001078317_003
Abstract
Disclosed herein are approaches for controlling temperature uniformity of a wafer using a wafer pedestal shielding element. In one approach, a wafer support assembly may include a pedestal comprising a first main side opposite a second main side, wherein the first main side is operable to receive a wafer. The wafer support assembly may further include a shielding element adjacent the second main side of the pedestal, the shielding element extending around an outer edge of the pedestal.
Need to check novelty before this filing date? Find Prior Art