Substrate support platform, substrate processing apparatus and components

TW202641258APending Publication Date: 2026-10-01TOKYO ELECTRON LTD
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Patent Information

Application Number
TW115103707
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2026-01-28
Filing Date
2026-01-30
Publication Date
2026-10-01

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Abstract

A substrate support platform includes: an upper member having a substrate support surface; a base; an intermediate member disposed between the upper member and the base, and including a liquid metal receiving part for movably receiving liquid metal; and a liquid metal driving part for moving the liquid metal within the liquid metal receiving part.
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