System and method of offset inspection

TW202641274APending Publication Date: 2026-10-01GUDENG PRECISION IND CO LTD
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Patent Information

Application Number
TW114148216
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-27
Filing Date
2025-12-09
Publication Date
2026-10-01

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Abstract

An offset detection system and method are disclosed for use with a substrate carrier for accommodating a plurality of substrates to be tested. The offset detection system includes multiple detection elements for batch detection of multiple first offsets of the substrates to be tested or multiple second offsets of the substrate carrier. Each detection element has a detection point, and these detection points of the detection elements are distributed on the same reference plane. The detection method includes batch detection of multiple first offsets of the substrates to be tested or multiple second offsets of the substrate carrier by the multiple detection elements.
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