Methods for manufacturing transport devices, semiconductor manufacturing equipment, and semiconductor devices

Abstract

To prevent unnecessary contact between the semiconductor wafer and the transporter caused by warping of the semiconductor wafer, the transport device includes: a transporter for transporting the semiconductor wafer, a guide connected to the transporter and supporting the semiconductor wafer, and a component disposed below the guide that can adjust the height of the contact point between the guide and the semiconductor wafer according to the warping shape of the semiconductor wafer.

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