Substrate gripper

TW202641280APending Publication Date: 2026-10-01APPLIED MATERIALS INC
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114147420
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-21
Filing Date
2025-12-04
Publication Date
2026-10-01

Smart Images

  • Figure TWG2TA001078653_001
    Figure TWG2TA001078653_001
  • Figure TWG2TA001078653_002
    Figure TWG2TA001078653_002
  • Figure TWG2TA001078653_003
    Figure TWG2TA001078653_003
Patent Text Reader

Abstract

A substrate gripper includes a gripper body having a base configured to support a substrate by vacuum. The substrate gripper further includes a bowl-shaped collector coupled with the gripper body and configured to collect a flow of air. The substrate gripper further includes a bell-shaped flow cone coupled with the gripper body and configured to direct the flow of air toward an edge of the gripper body.
Need to check novelty before this filing date? Find Prior Art