Electrostatic chuck components and electrostatic chuck devices

Abstract

An electrostatic chuck component includes a substrate and an electrostatic adsorption electrode. The substrate has a first adsorption portion and a second adsorption portion. The electrostatic adsorption electrode includes a first electrode disposed in the first adsorption portion and a second electrode disposed in the second adsorption portion. The substrate has a first circumferentially convex curved surface (i.e., a first curved surface) and a second curved surface disposed in the circumferential direction at a different height position than the first curved surface on a first side peripheral surface. The substrate has a third circumferentially convex curved surface (i.e., a third curved surface) and a fourth curved surface disposed in the circumferential direction at a different height position than the third curved surface on a second side peripheral surface. The electrostatic chuck component satisfies the following formula (1): W1>t1+t2 …(1) (W1: width of the second adsorption portion, t1: height from the second mounting surface to the first mounting surface, t2: height from the lower surface of the substrate to the second mounting surface)

Images