Wafer-type sensor and imaging method
TW202641308APending Publication Date: 2026-10-01TOKYO ELECTRON LTD
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Patent Information
- Application Number
- TW114147542
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-13
- Filing Date
- 2025-12-04
- Publication Date
- 2026-10-01
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Abstract
An exemplary embodiment of the present invention provides a wafer-type sensor comprising a substrate, an imaging device, and at least one light source. The substrate includes a light-transmitting portion. The imaging device is disposed above the substrate such that it can capture an object below the substrate via the light-transmitting portion. At least one light source is disposed above the substrate such that it can irradiate light onto the object via the light-transmitting portion. The light-transmitting portion has a light-diffusing portion on the surface facing the at least one light source.
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