Manufacturing methods of optical components, laser irradiation devices, and optical components

Abstract

[Objective] To provide an optical component, a laser irradiation device, and a method for manufacturing the optical component that can irradiate a homogeneous laser beam without damaging the microlens array even when the laser light output from the laser source is high output. [Solution] The optical component 20 includes a beam shaping optics section 21, a first microlens array 23, an aperture diaphragm section 22, a second microlens array 24, a condenser lens 25, and a projection optics section 27, and is configured to satisfy the following conditions: (1) d0 = f2, (2) d1 = f1, and (3) 0.5 < f1 / d0 < 0.75. In the conditions, d0 is the distance between the first microlens array 23 and the second microlens array 24, d1 is the distance between the first microlens array 23 and the aperture diaphragm section 22, f1 is the focal distance of the first microlens 231, and f2 is the focal distance of the second microlens 241.

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