Substrate transfer robot and substrate transfer device with this

TW202641667APending Publication Date: 2026-10-16SYSTEM ENGINEERING MEGA SOLUTION CO LTD
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Patent Information

Application Number
TW114141101
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-24
Filing Date
2025-10-23
Publication Date
2026-10-16

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Abstract

The invention provides a substrate transfer robot and a substrate transfer device having the same. The substrate transfer robot is a substrate transfer robot technology that can handle different heterogeneous substrates simultaneously through the upper arm and the lower arm, which are placed up and down to separate the operating space, and can reduce the rotation dimension of the arm and expand the maximum stroke length by rotating the arm based on the eccentric arm rotation axis spaced apart from the main rotation axis that rotates the robot itself.
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