Method for producing a microelectromechanical device and microelectromechanical device
TW202641760APending Publication Date: 2026-10-16ROBERT BOSCH GMBH
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW115101089
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-01-15
- Filing Date
- 2026-01-12
- Publication Date
- 2026-10-16
Smart Images
Figure 00000000_0000_ABST
Abstract
The invention relates to a method for producing a microelectromechanical device. A first portion
Need to check novelty before this filing date? Find Prior Art