Water treatment method, water treatment device, and water treatment system
Patent Information
- Application Number
- TW115106281
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-04-02
- Filing Date
- 2026-02-23
- Publication Date
- 2026-10-16
- Estimated Expiration
- 2046-02-22
AI Technical Summary
Existing water treatment systems in semiconductor factories fail to provide high-purity water for purposes other than washing and auxiliary equipment around exhaust gas treatment equipment, relying on desalinated water of low quality and lacking efficient methods to enhance water purity for different applications.
A water treatment apparatus and system that includes a desalination pipeline supplying desalinated water to exhaust gas treatment equipment, with branching pipelines for further desalination to achieve water of 10 μS/cm or less, used for specific purposes such as cleaning and hydrogen generation, and a return pipeline to recycle wastewater, utilizing EDI devices and modular integration with exhaust gas treatment equipment.
Provides high-purity water for diverse applications, enhancing exhaust gas treatment efficiency and reducing impurities, while minimizing costs and equipment complexity by integrating desalination within the same building as the exhaust gas treatment equipment.
Smart Images
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Abstract
Description
Technical Field
[0001] This invention relates to a water treatment method, a water treatment device, and a water treatment system. Prior Technology
[0002] Exhaust gas treatment equipment (so-called pollution removal devices) is used to render harmful gases such as HF and NH3 emitted from semiconductor factories harmless. Exhaust gas treatment equipment performs processes such as absorbing and rendering harmless components in the exhaust gas through washing water, reducing the concentration of harmful components in the exhaust gas, or cooling the exhaust gas. In terms of cost and water conservation, the washing water in exhaust gas treatment equipment is mainly desalinated water recovered from the wastewater discharged from the exhaust gas treatment equipment through desalination treatment using an RO membrane or similar method. However, this desalinated water has a concentration of approximately 200 μS / cm and is not of high quality (not pure water). For example, Patent Document 1 discloses a technology for treating wastewater discharged from an exhaust gas treatment equipment and recovering it as washing water. The washing water can be of tap water quality, preferably RO-treated water used to make soft water or industrial water.
[0003] In exhaust gas treatment equipment, clarified water is sometimes required, in addition to its use as washing water. Furthermore, clarified water is also required for supplying water to auxiliary equipment used to purify exhaust gas located around the exhaust gas treatment equipment. However, previously, clarified water was not used for water intended for washing purposes other than those of the exhaust gas treatment equipment, nor for water supplied to auxiliary equipment.
[0004] For example, Patent Document 2 discloses a technique for supplying hydrogen to exhaust gas to reduce harmful components such as PFCs (perfluorinated compounds) contained in exhaust gas discharged from exhaust gas treatment equipment. Then, a method for generating hydrogen by means of an apparatus for electrolyzing water to produce hydrogen is also proposed. This apparatus is an auxiliary device surrounding the exhaust gas treatment equipment; however, the water electrolyzed by this apparatus is preferably clarified water (e.g., pure water), and previously, clarified water was not supplied to this apparatus. [Previous Technical Documents] [Patent Literature]
[0005] [Patent Document 1] Japanese Patent Application Publication No. 2022-070609 [Patent Document 2] Japanese Patent Publication No. 2023-547670 Summary of the Invention
[0006] [The problem the invention aims to solve] The purpose of this disclosure is to provide a water treatment method, water treatment apparatus, and water treatment system that can improve the purity of water used for different purposes than washing water supplied to exhaust gas treatment equipment or water supplied to auxiliary equipment installed around exhaust gas treatment equipment. [Problem-solving methods]
[0007] Furthermore, the water treatment apparatus disclosed herein includes: a desalination water pipeline for supplying desalinated water, used as washing water, to an exhaust gas treatment device for treating exhaust gas; a water supply pipeline branching from the desalination water pipeline and carrying a portion of the desalination water; a desalination device for further desalinating the portion of the desalination water supplied by the water supply pipeline; a treatment water pipeline A or a treatment water pipeline B, wherein treatment water pipeline A supplies the desalinated water treated by the desalination device for use as water for a different purpose than the washing water to the exhaust gas treatment device or a first auxiliary device installed around the exhaust gas treatment device; and treatment water pipeline B supplies the desalinated water treated by the desalination device for use as water for a different purpose than the washing water to a second auxiliary device for treating the exhaust gas installed around the exhaust gas treatment device.
[0008] Furthermore, in this water treatment device, the conductivity of the treated water desalinated by the desalination equipment is preferably below 10 μS / cm.
[0009] Furthermore, in this water treatment device, the desalination equipment preferably includes an EDI device.
[0010] Furthermore, in this water treatment device, the desalination equipment is preferably located in the same building as the exhaust gas treatment equipment.
[0011] Furthermore, in the water treatment device, the desalination equipment is preferably modularized into the exhaust gas treatment equipment.
[0012] Furthermore, in this water treatment apparatus, the first additional equipment is preferably a chemical liquid manufacturing apparatus.
[0013] Furthermore, in the water treatment apparatus, the second additional equipment preferably includes: a water electrolysis hydrogen generation device, which electrolyzes water to generate hydrogen gas, and has: a hydrogen gas pipeline, which supplies the treated water that has been desalinated by the desalination equipment through the treated water pipeline B to the hydrogen gas generated by the water electrolysis hydrogen generation device, and supplies the exhaust gas treated by the exhaust gas treatment equipment or the gas treated in the exhaust gas treatment equipment.
[0014] Furthermore, the water treatment device preferably includes a return pipeline that returns the wastewater discharged from the desalination equipment to a washing water pipeline used to supply the washing water to the exhaust treatment equipment.
[0015] Furthermore, one embodiment of the water treatment system disclosed herein includes: the water treatment device; and the exhaust treatment equipment.
[0016] Furthermore, the water treatment method disclosed herein includes: step A, supplying desalinated water, which is used as washing water, to an exhaust gas treatment device for treating exhaust gas; step B, branching from the desalinated water pipeline and supplying a portion of the desalinated water; a desalination step, further desalinating the portion of the desalinated water supplied in step B by a desalination device; and a treated water supply step or a treated water supply step, wherein the treated water supply step supplies the treated water after the desalination step to the exhaust gas treatment device or a first auxiliary device installed around the exhaust gas treatment device for a purpose different from the washing water, and the treated water supply step supplies the treated water after the desalination step to a second auxiliary device for treating the exhaust gas installed around the exhaust gas treatment device for a purpose different from the washing water. [Benefits of the Invention]
[0017] According to this disclosure, a water treatment method, water treatment apparatus, and water treatment system may be provided that can improve the purity of water used for different purposes than washing water supplied to exhaust gas treatment equipment and / or water supplied to auxiliary equipment installed around exhaust gas treatment equipment. Simple Explanation of the Diagram
[0018] [Figure 1] is a schematic diagram showing an example of a purification system equipped with a water treatment device according to this embodiment. [Figure 2] is a schematic diagram showing another example of a purification system equipped with a water treatment device related to this embodiment. [Figure 3] is a schematic diagram showing another example of a purification system equipped with a water treatment device related to this embodiment. [Figure 4] is a schematic diagram showing another example of a purification system equipped with a water treatment apparatus related to this embodiment. Implementation
[0019] The following describes an embodiment of this disclosure. This embodiment is one example of implementing this disclosure, and this disclosure is not limited to this embodiment.
[0020] Figure 1 is a schematic diagram showing an example of a purification system equipped with a water treatment device according to this embodiment. The purification system 1 shown in Figure 1 includes a water treatment system 2, which includes: a water treatment device 10; and an exhaust gas purification device 12.
[0021] The exhaust gas purification device 12 is used to treat exhaust gas emitted from semiconductor factories, etc., but its composition is not limited. For example, as shown in FIG1, it includes: exhaust gas treatment equipment 14, exhaust gas inlet pipeline 16, desalination water pipeline 18 (serving as washing water pipeline), gas discharge pipeline 20, drainage discharge pipeline 22, circulation pipeline 24, circulation pump 26, and fluid nozzles 28a and 28b. The exhaust gas treatment equipment 14 includes: a gas-liquid contact section 14a and a storage section 14b. The gas-liquid contact section 14a shown in FIG1 serves as a flow channel for the exhaust gas to circulate in a meandering manner. Although not shown, the exhaust gas treatment equipment 14 is provided with a gas inlet, a water supply outlet, a gas outlet, and a circulation inlet located on the side of the gas-liquid contact section 14a. The gas inlet is connected to the exhaust gas inlet pipeline 16, the water supply outlet is connected to one end of the desalination water pipeline 18, the gas outlet is connected to the gas discharge pipeline 20, and the circulation inlet is connected to one end of the circulation pipeline 24. Furthermore, although the exhaust treatment device 14 is not shown in the figure, it is equipped with a drain outlet and a circulation outlet located on the storage section 14b side. The drain outlet is connected to one end of the drain discharge pipeline 22, and the circulation outlet is connected to the other end of the circulation pipeline 24.
[0022] Fluid nozzles 28a and 28b are disposed within the gas-liquid contact section 14a. Fluid nozzle 28a is connected to the desalination water pipeline 18, and fluid nozzle 28b is connected to the circulation pipeline 24. The circulation pump 26 is disposed within the circulation pipeline 24.
[0023] The water treatment device 10 includes: a desalination unit 30, a water supply line 32, a treated water line 34 (treated water line A), and a drainage line 36. One end of the water supply line 32 is connected to the desalination treated water line 18, and the other end is connected to the drainage inlet (not shown) of the desalination unit 30. One end of the treated water line 34 is connected to the treated water outlet (not shown) of the desalination unit 30, and the other end is connected to the supply port (not shown) of the exhaust gas treatment unit 14. One end of the drainage line 36 is connected to the drainage outlet (not shown) of the desalination unit 30, and the other end is connected to the supply port (not shown) of the storage section 14b of the exhaust gas treatment unit 14.
[0024] The desalination equipment 30 is a device that desalinates the target wastewater. Examples include: an RO device equipped with a reverse osmosis membrane, an ion exchange device equipped with ion exchange resin, and an EDI device. The EDI device is an electro-regenerative deionization device that obtains treated water from the target wastewater after ion removal through electro-regeneration desalination, and wastewater with increased ion content. These devices can be used individually or in combination. The RO device, ion exchange device, and EDI device can be conventional devices, and their specific configuration is not particularly limited. The target wastewater is desalinated water (hereinafter sometimes referred to as first desalinated water) supplied to the exhaust treatment equipment 14 as washing water. The desalination equipment 30 may further be equipped with devices such as activated carbon filters, microfiltration membranes, ultrafiltration membranes, activated carbon devices, water softening devices, and ultraviolet sterilization devices as needed.
[0025] The purification system 1 shown in Figure 1 includes a wastewater recycling system 3. The wastewater recycling system 3 is located in a building different from the building where the water treatment system 2 is located, or outdoors. The wastewater recycling system 3 desalinates the wastewater discharged from the exhaust gas treatment equipment 14 and recycles it as washing water for the exhaust gas treatment equipment 14. The wastewater recycling system 3 shown in Figure 1 includes: at least a wastewater desalination device 38; and a first desalination treatment water tank 40. One end of the desalination treatment water pipeline 42 is connected to the treated water outlet (not shown) of the wastewater desalination device 38, and the other end is connected to the inlet (not shown) of the first desalination treatment water tank 40. Examples of wastewater desalination devices 38 include: an RO device equipped with a reverse osmosis membrane, an ion exchange device equipped with ion exchange resin, and an EDI device. These devices can be used individually or in combination. During the desalination treatment of the wastewater desalination device 38, first desalinated water with a conductivity of, for example, around 200 μS / cm (e.g., around 180~200 μS / cm) can be obtained. The first desalination tank 40 stores desalinated water. Furthermore, the outlet of the first desalination tank 40 (not shown) is connected to the other end of the aforementioned desalination water pipeline 18.
[0026] The operation of the purification system 1 shown in Figure 1 will be explained.
[0027] Exhaust gas is supplied to the gas-liquid contact section 14a of the exhaust gas treatment device 14 via exhaust gas inlet pipe 16, and the first desalination water in the first desalination water tank 40 is supplied to the exhaust gas treatment device 14 as washing water via desalination water pipe 18 (step A). The washing water is sprayed from fluid nozzle 28a into the gas-liquid contact section 14a. In the gas-liquid contact section 14a, the exhaust gas and the washing water sprayed from the fluid nozzle 28a make gas-liquid contact. The treated gas after exhaust gas or gas-liquid contact can also be heated as needed. Furthermore, the storage section 14b of the exhaust gas treatment device 14 stores the washing water supplied to the gas-liquid contact section 14a, but the washing water stored in the storage section 14b is sprayed from the fluid nozzle 28b into the gas-liquid contact section 14a via the circulation pump 26 and circulation pipe 24. Inside the gas-liquid contact section 14a, the washing water sprayed from the fluid nozzle 28b comes into gas-liquid contact with the exhaust gas flowing through the gas-liquid contact section 14a. Then, through the gas-liquid contact between the exhaust gas and the washing water, the particulate matter and harmful components (such as ammonia, PFCs, NOx, etc.) in the exhaust gas are absorbed by the washing water and rendered harmless, or the concentration of particulate matter and harmful components is reduced, or the exhaust gas is cooled.
[0028] Furthermore, in the purification system 1 of Figure 1, a portion of the first desalination water from the desalination water pipeline 18 is supplied to the water supply pipeline 32 (step B). The desalination water from the water supply pipeline 32 is then supplied to the desalination equipment 30 for desalination treatment (desalination step). Through the desalination treatment performed by the desalination equipment 30, the first desalination water is separated into treated water with a reduced concentration of impurity ions and wastewater with an increased concentration of impurity ions. In this way, by further desalinating the desalination water, highly pure treated water is obtained (hereinafter referred to as second desalination water). The desalination treatment performed by the desalination equipment 30 can yield, for example, second desalination water with a conductivity of 10 μS / cm or less.
[0029] The second desalinated water obtained by the desalination equipment 30 is supplied to the exhaust gas treatment equipment 14 through the treated water pipeline 34 and used as exhaust gas treatment equipment water for the exhaust gas treatment equipment 14. The exhaust gas treatment equipment water can also be used as washing water for the exhaust gas treatment equipment 14, or it can be supplied to the exhaust gas treatment equipment 14 for a different purpose than washing water (treated water supply step). When the treated water is used as washing water for the exhaust gas treatment equipment 14, for example, a fluid nozzle (not shown) can be installed at the other end of the treated water pipeline 34, and the second desalinated water (washing water) can be sprayed from the fluid nozzle into the gas-liquid contact section 14a to create gas-liquid contact with the exhaust gas passing through the gas-liquid contact section 14a. The second desalinated water is high-purity water, thus effectively reducing harmful components in the exhaust gas. Furthermore, the second desalination water can be used for purposes different from the washing water of the exhaust treatment equipment 14, such as cleaning the interior of the exhaust treatment equipment 14. For example, the second desalination water, through the treated water line 34, can be sprayed towards the inner wall of the exhaust treatment equipment 14 to dissolve or disperse solids adhering to the inner wall, thereby cleaning the interior of the exhaust treatment equipment 14. The second desalination water is preferably pure water with a conductivity of, for example, approximately 10 μS / cm or less, and more preferably 1 μS / cm or less. If non-clarified water is supplied, the removal of solids adhering to the inner wall of the exhaust treatment equipment 14 may be insufficient. The wastewater discharged from the desalination equipment 30 can be discharged outside the system or supplied to the storage section 14b through the drain line 36.
[0030] After being treated in the gas-liquid contact section 14a, the exhaust gas is discharged from the gas discharge line 20 as treated gas. Furthermore, a portion of the water stored in the storage section 14b is periodically discharged from the drainage discharge line 22, for example, as wastewater, and supplied to the wastewater desalination equipment 38 for desalination treatment. The desalinated water (with a conductivity of, for example, around 200 μS / cm) desalinated by the wastewater desalination equipment 38 is stored in the first desalination water tank 40 via the desalination water line 42. The desalination water recovery rate (desalination water volume / wastewater volume of the wastewater desalination equipment × 100) in the wastewater recovery system 3 is generally 90-96%, therefore, the first desalination water tank 40 is preferably supplied with approximately 4-10% makeup water periodically from the makeup line 44. The makeup water can be water with a purity lower than pure water, such as tap water or equipment water. The wastewater (e.g., RO concentrate) discharged from the wastewater desalination equipment 38 is transported from the wastewater discharge line 45 toward the outside of the system.
[0031] Figure 2 is a schematic diagram showing another example of a purification system equipped with the water treatment apparatus of this embodiment. In the purification system 5 shown in Figure 2, components that are the same as those in the purification system 1 shown in Figure 1 are given the same reference numerals, and their descriptions are omitted. In the purification system 5 shown in Figure 2, the exhaust gas purification device 12 is equipped with a first additional device 46.
[0032] Since the first auxiliary device 46 is installed around the exhaust treatment device 14 to use the second desalinated water, which has been desalinated by the desalination device 30, for a different purpose than washing water, the auxiliary device 46 is installed around the exhaust treatment device 14. "Around the exhaust treatment device 14" means an area within the same building or on the same floor as the exhaust treatment device 14, or a unitized unit with the exhaust treatment device 14. Examples of the first auxiliary device 46 include a chemical solution manufacturing apparatus for producing a chemical solution to clean the exhaust treatment device 14. The second desalinated water obtained by the desalination device 30 is supplied to the first auxiliary device 46 via the treated water pipeline 34 (treated water supply step). Then, if the first auxiliary device 46 includes a chemical solution manufacturing apparatus, the supplied treated water is mixed with chemicals to produce a chemical solution. The chemical liquid is used for purposes such as cleaning the exhaust gas treatment equipment 14. Specifically, examples include inorganic alkalis such as sodium hydroxide, potassium hydroxide, ammonia, and sodium metasilicate; and organic alkalis such as choline and THAH. The chemical liquid produced in the chemical liquid manufacturing device is sprayed onto the inner wall of the exhaust gas treatment equipment 14 through a chemical liquid pipeline 47 connecting the chemical liquid manufacturing device and the exhaust gas treatment equipment 14, thereby dissolving or dispersing solids adhering to the inner wall and thus cleaning the inside of the exhaust gas treatment equipment 14. The second desalination water is preferably pure water with a conductivity of, for example, approximately 10 μS / cm or less, preferably 1 μS / cm or less. If non-clarified water is supplied, the removal of solids adhering to the inner wall of the exhaust gas treatment equipment 14 may be insufficient.
[0033] Figure 3 is a schematic diagram showing another example of a purification system equipped with the water treatment apparatus of this embodiment. In the purification system 6 shown in Figure 3, the same reference numerals are used for components that are the same as those in the purification system 1 shown in Figure 1, and their descriptions are omitted. In the purification system 6 shown in Figure 3, the exhaust gas purification device 12 is equipped with a second auxiliary device 50. The second auxiliary device 50 is not particularly limited as long as it is a device used to install around the exhaust gas treatment device 14 and to treat exhaust gas, and examples include, for example, a water electrolysis hydrogen generation device that generates hydrogen gas by electrolyzing water, and a cleaning liquid manufacturing device that manufactures cleaning liquid, etc. The term "around the exhaust gas treatment device 14" means the area within the same building or on the same floor as the exhaust gas treatment device 14.
[0034] The second desalinated water obtained by the desalination equipment 30 is supplied to the second auxiliary equipment 50 via a treated water pipeline 35 (treated water pipeline B) connecting the desalination equipment 30 and the second auxiliary equipment 50 (treated water supply step). If the second auxiliary equipment 50 includes a water electrolysis hydrogen generator, the treated water supplied to the water electrolysis hydrogen generator is electrolyzed to generate hydrogen gas. Specifically, the water electrolysis hydrogen generator is equipped with an electrolytic cell having an anode and a cathode, and the treated water supplied to the electrolytic cell is electrolyzed to generate hydrogen gas from the cathode side (oxygen gas is generated from the anode side). The generated hydrogen gas is supplied to the gas-liquid contact section 14a of the exhaust gas treatment equipment 14 via a hydrogen pipeline 52 connecting the water electrolysis hydrogen generator and the gas-liquid contact section 14a of the exhaust gas treatment equipment 14 (hydrogen supply step). In the gas-liquid contact section 14a, harmful components such as PFCs and NOx in the exhaust gas are reduced and decomposed by hydrogen gas. By using washing water and hydrogen, the efficiency of exhaust gas treatment can be improved. Furthermore, a hydrogen pipeline can be installed connecting the water electrolysis hydrogen generator and the gas exhaust pipeline 20, from which hydrogen generated in the water electrolysis hydrogen generator is supplied to the gas being treated by the exhaust gas treatment equipment 14 (treated gas) (hydrogen supply step). This reduces and decomposes harmful components remaining in the treated gas. The water supplied to the water electrolysis hydrogen generator is preferably pure water with a conductivity of, for example, approximately 10 μS / cm or less, preferably 1 μS / cm or less. If non-clarified water is supplied, it may cause various malfunctions, such as decreased electrolysis efficiency, decreased purity of the generated hydrogen, or scale formation leading to equipment failure.
[0035] In the case where the second auxiliary equipment 50 includes a cleaning solution manufacturing device, the cleaning solution is manufactured using the supplied second desalination treatment water. The cleaning solution is, for example, an alkaline aqueous solution such as hydrogen peroxide or sodium hydroxide. The manufactured cleaning solution is used, for example, as washing water. That is, the cleaning solution manufactured by the cleaning solution manufacturing device is sprayed into the gas-liquid contact section 14a, where it comes into gas-liquid contact with the exhaust gas passing through the gas-liquid contact section 14a, thereby reacting with harmful components in the exhaust gas and removing harmful components from the exhaust gas. The cleaning solution can also be supplied to the desalination treatment water line 18, or it can be supplied to the gas-liquid contact section 14a through line 52. By using the aforementioned cleaning solution as washing water, the exhaust gas treatment efficiency can be improved. Furthermore, the cleaning solution manufactured in the cleaning solution manufacturing device can also be supplied to the gas being treated in the exhaust gas treatment equipment (treatment gas). This is used to treat harmful components remaining in the treatment gas.
[0036] This embodiment allows for the supply of high-purity water to the second auxiliary device 50, thereby improving the exhaust gas treatment efficiency of the second auxiliary device 50. The second auxiliary device 50 is preferably equipped with a water electrolysis hydrogen generation device, which efficiently generates hydrogen to reduce harmful gases. Furthermore, wastewater discharged from the second auxiliary device 50 can be discharged outside the system, or drained into the exhaust gas treatment device 14 via the drainage line 36, or returned to the desalination water treatment line 18 and the inlet of the desalination device 30.
[0037] Figure 4 is a schematic diagram showing another example of a purification system equipped with a water treatment apparatus related to this embodiment. In the purification system 7 shown in Figure 4, the same reference numerals are used for components that are the same as those in the purification system 6 shown in Figure 3, and their descriptions are omitted. In the purification system 7 shown in Figure 4, one end of the drain line 36 is connected to the drain outlet (not shown) of the desalination equipment 30, and the other end is connected to the desalination water line 18. The drain line 36 in Figure 4 functions as a return line that returns the wastewater discharged from the desalination equipment 30 to the desalination water line 18 (washing water line) through which the first desalination water (washing water) flows. By returning the wastewater discharged from the desalination equipment 30 to the desalination water line 18 (return step), the wastewater and desalination water are mixed and supplied to the gas-liquid contact section 14a of the exhaust gas treatment equipment 14, thereby suppressing the reduction of the supply of washing water. In Figure 4, the drainage pipeline 36 is connected to the desalination water pipeline 18 in a way that returns the drainage to the upstream side of the desalination equipment 30. However, the drainage can also be connected to the desalination water pipeline 18 in a way that returns the drainage to the downstream side of the desalination equipment 30.
[0038] The appropriate treatment conditions for water treatment in this embodiment will be explained below.
[0039] The exhaust gas treatment equipment 14 is located in a dedicated space within a manufacturing plant, such as a semiconductor manufacturing plant. Generally, this space does not have pipelines for supplying pure or ultrapure water. Therefore, laying new supply pipelines to supply such water to the exhaust gas treatment equipment 14 would result in longer distances and higher costs. Furthermore, the increased use of pure or ultrapure water may necessitate the development of additional pure or ultrapure water production equipment. To mitigate such high costs, the desalination equipment 30 is preferably located within the same building as the exhaust gas treatment equipment 14, and more preferably, it is modularized with the exhaust gas treatment equipment 14. Here, modularization means integrating the exhaust gas treatment equipment 14 and the desalination equipment 30. Specifically, the exhaust gas treatment equipment 14 and the desalination equipment 30 are housed within a frame or fixed to a frame, forming a single unit. When the desalination equipment 30 and the exhaust gas treatment equipment 14 are located within the same building, it is preferable to place the desalination equipment 30 near the exhaust gas treatment equipment 14. In addition, the desalination equipment 30 may also be installed in a different building than the building where the exhaust treatment equipment 14 is installed. However, in this case, attention needs to be paid to the point where the treatment water pipeline 34 supplying the second desalination treatment water from the desalination equipment 30 to the exhaust treatment equipment 14 becomes longer.
[0040] One desalination device 30 may be provided for one exhaust treatment device 14, or one desalination device 30 may be provided for multiple exhaust treatment devices 14.
[0041] The supply rate of the second desalination water from the desalination unit 30 to the exhaust gas treatment unit 14, the first auxiliary unit 46, or the second auxiliary unit 50 varies depending on the scale of the unit. For example, only a small amount of hydrogen is needed for the reduction treatment of the exhaust gas, so it can be about 1 / 10 to 1 / 1000 of the supply rate of the first desalination water from the first desalination water tank 40 to the exhaust gas purification unit 12. Therefore, the desalination unit 30 only needs to be small-scale, and as mentioned above, it can be easily installed in the same building as the exhaust gas treatment unit 14, or as a unit of the exhaust gas treatment unit 14. The supply rate of the first desalination water from the first desalination water tank 40 to the exhaust gas treatment unit 14 varies depending on the scale of the unit, for example, in the range of 1 to 100 L / min.
[0042] The desalination equipment 30 preferably includes an EDI device. By using an EDI device, there is no need for equipment such as chemical injection devices, allowing the desalination equipment 30 to be miniaturized. Furthermore, the first desalinated water stored in the first desalination tank 40 from the wastewater desalination equipment 38 may contain ammonia and be alkaline (pH 9 or higher), or it may contain fluoride and be acidic (pH 5 or lower). In this case, when the desalination equipment 30 is used solely for RO membrane treatment, for example, at the point where the ammonia or fluoride rejection rate increases, it is preferable to adjust the pH of the first desalinated water to a neutral range (e.g., pH 6-8) before treatment. When treating first desalinated water containing ammonia and being alkaline, or when treating first desalinated water containing fluoride and being acidic, it is preferable to use an EDI device that can remove ammonia or fluoride even without adjusting the pH to a neutral range. This allows for the reduction or elimination of pH adjustment equipment, thus lowering costs. Preferably, even without pH adjustment, an RO membrane is installed upstream of the EDI to reduce components other than ammonia or fluoride. Additionally, hydrogen released from the electrode water of the EDI unit can be recovered and used for exhaust treatment in the exhaust treatment device 14.
[0043] [Note] Composition 1: A water treatment device, comprising: The desalination water pipeline supplies desalinated water, which is used for washing, to the exhaust gas treatment equipment. The water supply pipeline is a branch of the desalination water pipeline that carries a portion of the desalination water. The desalination equipment further desalinates a portion of the desalinated water supplied by the water supply pipeline. Treatment water pipeline A or treatment water pipeline B, wherein treatment water pipeline A supplies water desalinated by the desalination equipment for a different purpose than the washing water to a first auxiliary device located on or around the exhaust treatment equipment, and treatment water pipeline B supplies water desalinated by the desalination equipment for a different purpose than the washing water to a second auxiliary device for treating the exhaust gas located on or around the exhaust treatment equipment. Composition 2: As in the water treatment apparatus comprising 1, the conductivity of the treated water desalinated by the desalination equipment is less than 10 μS / cm. Composition 3: For example, a water treatment device comprising 1 or 2, wherein the desalination equipment includes an EDI device. Composition 4: If it constitutes a water treatment device of any one of 1 to 3, wherein the desalination equipment is installed in the same building as the exhaust gas treatment equipment. Composition 5: If a water treatment device is configured as any one of 1 to 4, wherein the desalination equipment is unitized with the exhaust gas treatment equipment. Composition 6: If the water treatment device constitutes any one of 1 to 5, wherein the first additional equipment is a chemical liquid manufacturing device. Composition 7: If the water treatment device constitutes any one of 1 to 6, the second additional equipment includes: a water electrolysis hydrogen generation device, which electrolyzes water to generate hydrogen gas; It includes: a hydrogen pipeline that supplies treated water that has been desalinated by the desalination equipment through the treated water pipeline B to the hydrogen generated by the water electrolysis hydrogen generator, and supplies the hydrogen to the exhaust gas or the gas treated in the exhaust gas treatment equipment. Composition 8: If a water treatment device constitutes any one of 1 to 7, it has: a return pipeline that returns the wastewater discharged from the desalination equipment to a washing water pipeline used to supply the washing water to the exhaust treatment equipment. Composition 9: A water treatment system comprising: a water treatment device as configured in any of 1 to 8; and an exhaust treatment device. Composition 10: A water treatment method, comprising: Step A involves supplying desalinated water, which is used for washing, to the exhaust gas treatment equipment. Step B involves branching off from the desalination water pipeline and supplying a portion of the desalination water. The desalination process involves further desalinating a portion of the desalination water supplied in step B using desalination equipment. The water supply step or water treatment step involves supplying the treated water from the desalination step to the exhaust gas treatment equipment or a first auxiliary equipment located around the exhaust gas treatment equipment for a purpose different from the washing water. The water treatment supply step involves supplying the treated water from the desalination step to a second auxiliary equipment for treating the exhaust gas located around the exhaust gas treatment equipment for a purpose different from the washing water.
[0044] 1, 5, 6, 7: Purification System 2: Water treatment system 3: Wastewater recycling system 10: Water treatment equipment 12: Exhaust gas purification device 14: Exhaust Treatment Equipment 14a: Gas-liquid contact section 14b: Storage Department 16: Exhaust inlet pipeline 18: Desalination water pipeline 20: Gas exhaust pipeline 22: Drainage outlet pipeline 24: Circulation pipeline 26: Circulation pump 28a, 28b: Fluid nozzles 30: Desalination equipment 32: Water supply pipeline 34, 35: Water treatment pipelines 36: Drainage pipes 38: Drainage desalination equipment 40: First desalination treatment tank 42: Desalination water pipeline 44: Supply pipeline 45: Drainage outlet pipeline 46: First Additional Equipment 47: Chemical Liquid Piping 50: Second Additional Equipment 52: Hydrogen pipeline
Claims
1. A water treatment apparatus comprising: a desalination water pipeline for supplying desalinated water, used as washing water, to an exhaust gas treatment device for treating exhaust gas; a water supply pipeline branching from the desalination water pipeline and carrying a portion of the desalination water; a desalination device for further desalinating a portion of the desalination water supplied to the water supply pipeline; and a treatment water pipeline A or a treatment water pipeline B, wherein treatment water pipeline A supplies the desalinated water, treated by the desalination device, for use as water for a different purpose than the washing water, to the exhaust gas treatment device or a first auxiliary device located around the exhaust gas treatment device; and treatment water pipeline B supplies the desalinated water, treated by the desalination device, for use as water for a different purpose than the washing water, to a second auxiliary device for treating the exhaust gas located around the exhaust gas treatment device.
2. The water treatment apparatus of claim 1, wherein the conductivity of the treated water desalinated by the desalination equipment is less than 10 μS / cm.
3. The water treatment apparatus as requested in item 1 or 2, wherein the desalination equipment includes an EDI device.
4. The water treatment apparatus as requested in item 1 or 2, wherein the desalination equipment is located in the same building as the exhaust gas treatment equipment.
5. The water treatment apparatus as claimed in claim 1 or 2, wherein the desalination equipment is unitized with the exhaust gas treatment equipment.
6. The water treatment apparatus as claimed in claim 1 or 2, wherein the first additional equipment is a chemical liquid manufacturing apparatus.
7. The water treatment apparatus of claim 1 or 2, wherein the second additional equipment comprises: a water electrolysis hydrogen generation device that electrolyzes water to generate hydrogen; and a hydrogen pipeline that supplies treated water that has undergone desalination treatment by the desalination device through the treated water pipeline B to the hydrogen generated by the water electrolysis hydrogen generation device, and supplies it to the exhaust gas treated by the exhaust gas treatment device or the gas treated by the exhaust gas treatment device.
8. The water treatment apparatus of claim 1 or 2, wherein the apparatus comprises: a return line for returning the wastewater discharged from the desalination equipment to the desalination water line for supplying the washing water to the exhaust treatment equipment.
9. A water treatment system comprising: a water treatment apparatus as claimed in claim 1 or 2; and the exhaust gas treatment equipment.
10. A water treatment method comprising: step A, supplying desalinated water used as washing water to an exhaust gas treatment device for treating exhaust gas; step B, branching the desalinated water and obtaining a portion of the desalinated water; a desalination step, further desalinating the portion of the desalinated water obtained in step B by a desalination device; and a treated water supply step or a treated water supply step, wherein the treated water supply step supplies the treated water after the desalination step to the exhaust gas treatment device or a first auxiliary device disposed around the exhaust gas treatment device for a purpose different from the washing water; and the treated water supply step supplies the treated water after the desalination step to a second auxiliary device for treating the exhaust gas disposed around the exhaust gas treatment device for a purpose different from the washing water.