Thermal evaporation system and method of coating a coating region on a front surface of a substrate

TW202641988APending Publication Date: 2026-10-16MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV
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Patent Information

Application Number
TW115127259
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2021-07-28
Filing Date
2022-07-12
Publication Date
2026-10-16

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Abstract

This invention relates to a thermal evaporation system (200) for coating a coating region (58) on a substrate (50) prior to thermal evaporation and / or sublimation of a source material (40) via electromagnetic radiation (80). Additionally, this invention relates to a method for coating a coating region (58) on a substrate (50) prior to thermal evaporation and / or sublimation of a source material (40) via electromagnetic radiation (80). The present invention relates to a thermal evaporation system (200) for coating a coating region (58) on a front surface (56) of a substrate (50) with a source material (40) thermally evaporated and / or sublimated from a source (30) by electromagnetic radiation (80). from a source (30) thermally evaporated and / or sublimated by electromagnetic radiation (80).
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