Magnetic bearing device and vacuum pump

Abstract

The present invention includes a rotating body (103), an electromagnet unit (104) supporting the rotating body (103) in a non-contact manner, and a displacement sensor unit (107) configured by a component separate from the electromagnet unit (107) and detecting a displacement of the rotating body (103). The electromagnet unit (104) includes a stator core (11) and an electromagnet pole (17), and the displacement sensor unit (107) includes a displacement sensor core (21) and a displacement sensor. Displacement sensor poles (23, 24) are arranged in an axial direction (Z) within a size range of the electromagnet poles (17) and in a circumferential direction (C) between adjacent electromagnet poles (17). The displacement sensor unit (107) is arranged outward from the stator core (11) in the axial direction (Z) and includes a positioning part (25) for positioning relative to the electromagnet unit (104). The present invention includes a rotating body (103), an electromagnet unit (104) that supports the rotating body (103) in a non-contact manner, and a displacement sensor unit (107) that is configured of a separate member from the electromagnet unit (107) and detects a displacement of the rotating body (103), wherein the electromagnet unit (104) includes a stator core (11) and a electromagnet magnetic pole (17), the displacement sensor unit (107) includes a displacement sensor core (21) and displacement sensor magnetic poles (23, 24), the displacement sensor magnetic poles (23, 24) are disposed within a dimensional range of the electromagnet magnetic pole (17) in an axial direction (Z) and between the electromagnet magnetic poles (17) adjacent to each other in a circumferential direction (C),and the displacement sensor unit (107) is disposed outward from the stator core (11) in the axial direction (Z) and includes a positioning portion (25) for positioning relative to the electromagnet unit (104).,

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