Magnetohydrodynamic sealing rotary device and substrate processing equipment

Abstract

This application discloses a magnetic fluid sealing rotary device and a substrate processing apparatus, relating to the field of semiconductor manufacturing equipment. The magnetic fluid sealing rotary device includes: a rotating shaft with a hollow interior forming a receiving cavity, and an opening at the bottom of the rotating shaft; a stator disposed outside the rotating shaft and connected to it via a first bearing; a magnetic fluid seal surrounding the rotating shaft and disposed between the rotating shaft and the stator; a temperature sensor disposed within the receiving cavity, extending along the extension direction of the rotating shaft and protruding from the opening, the temperature sensor being used to measure the temperature of the rotating shaft; and a mounting base disposed below the rotating shaft and connected to the stator, used to fix the temperature sensor so that the temperature sensor does not rotate with the rotating shaft.

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