A bulk liquefied gas supply system

Abstract

The invention is relative to a bulk liquefied gas supply system, the system comprises a storage tower, a liquid transport system, a plurality of gas supply devices, a gas transport system and a control device. The storage tower stores a large amount of liquefied gas for supplying the liquefied gas to the gas supply devices through the liquid transport system. The gas supply device heats and vaporizes the liquefied gas into gas, and the gas will be transported to the semiconductor manufacturing apparatus through the gas transport system. Each gas supply device includes a liquid fill mode, a gas supply mode and a mixed mode. The gas supply device can be filled the liquefied gas and vaporize the liquid gas at the same time in the mixed mode, so that the storage container can stably and continuously output the gas without replacing another storage container, and the weight of the gas in the storage container can be controlled in a safe state by the control device.

Description

Technical Field

[0001] This invention relates to a bulk liquid gas supply system for semiconductor manufacturing processes, particularly a system that can achieve a continuous and stable gas supply without replacing the storage container during the heating and vaporization of liquid gas in a fixed storage container, while simultaneously replenishing the storage container with unheated liquid gas to ensure the continuity and efficiency of the supply process. Prior Technology

[0002] In the semiconductor manufacturing field (such as wafers, panels, or light-emitting diodes), a variety of special gases are usually required during the processing, such as ammonia (NH₃), silane (SiH₄), nitrous oxide (N₂O), and carbon dioxide (CO2). Some of these gases are stored in liquid form, such as carbon dioxide (CO2).

[0003] Current gas supply equipment typically uses replaceable gas cylinders. This involves a heating device installed in a separate space, using cylinders filled with liquefied gas. During use, the cylinder is connected to the gas delivery pipeline. The heating device heats the cylinder, vaporizing the liquefied gas. The vaporized gas is then delivered to the gas supply system (such as a gas cabinet), and finally, the gas is transported from the gas cabinet to the point of use (POU) of the process equipment.

[0004] However, due to the limited capacity of gas cylinders, they need to be replaced after each use. Furthermore, these special gases often pose potential dangers such as corrosiveness, spontaneous combustion, or asphyxiation, making the cylinder replacement process more complex and time-consuming. At the same time, the consumption of gas cylinders is extremely large, further increasing costs and operational burdens.

[0005] Therefore, eliminating the time required for gas cylinder replacement, ensuring a stable gas supply, and guaranteeing the safety of the gas supply process have become critical issues that the semiconductor industry urgently needs to address. Summary of the Invention

[0006] The main objective of this invention is to provide a supply system that can continuously supply liquid gas, wherein a fixed storage container is connected to a liquid supply system at one end and a gas supply system at the other end. While heating and vaporizing the liquid gas, the fixed storage container can automatically replenish the consumed liquid gas, and there is no need to replace the gas cylinder, thus ensuring the stability and continuity of the supply process.

[0007] The secondary purpose of this invention is to have a weight sensor at the bottom of the storage container. When there is a large weight difference between the two storage containers during synchronous supply, the supply system will balance them by supplementing liquid gas.

[0008] Another objective of this invention is to have a double-layer structure on the outside of the pipeline for transporting liquid gas, which includes a vacuum layer and a heat insulation layer, so that the liquid gas is continuously maintained in the liquid phase.

[0009] Another objective of this invention is to enable the control device to remotely operate various parameters of the weight sensor.

[0010] To achieve the aforementioned objectives, the bulk liquid gas supply system of the present invention comprises: a storage tower, a liquid supply system, multiple gas supply devices, a gas supply system, and a control device.

[0011] The storage tower has a large storage capacity to store a liquid gas; the liquid supply system has a liquid delivery pipeline and a booster pump installed in the liquid delivery pipeline. An upstream end of the liquid delivery pipeline is connected to the storage tower, and a downstream end of the liquid delivery pipeline forms a plurality of parallel liquid supply pipelines. Each liquid supply pipeline is equipped with a first start valve that can be opened and closed.

[0012] Furthermore, the plurality of gas supply devices are connected one-to-one to each liquid supply line. Each gas supply device includes a storage container, a heater, and a weight sensor. The storage container has an inlet valve and an outlet valve. The inlet valve is located in the lower half of the storage container, while the outlet valve is located in the upper half of the storage container. The heater is located at the bottom outside the storage container. The heater heats the liquid gas input from the inlet valve through a change in magnetic flux, causing the liquid gas to vaporize into a target gas output from the outlet valve. The weight sensor is located below the storage container and can detect a current weight value of the storage container.

[0013] Furthermore, the gas supply system has a downstream gas supply line and at least one heating line for maintaining the temperature of the downstream gas supply line. An upstream section of the downstream gas supply line forms a plurality of parallel-arranged upstream gas supply lines, each upstream gas supply line having a second start valve that can be opened and closed. The control device is electrically connected to each first start valve, each second start valve, and each weight sensor. The control device can activate the corresponding first start valve based on the current weight value of each weight sensor, thereby allowing the liquid gas to enter the storage container. The control device can also activate the second start valve, thereby allowing the target gas to be output from the storage container.

[0014] The gas supply device has a liquid replenishment mode, a gas supply mode, and a mixing mode. In the liquid replenishment mode, the first start valve is opened and the second start valve is closed. In the gas supply mode, the first start valve is closed and the second start valve is opened. In the mixing mode, the first start valve and the second start valve can be opened simultaneously, so that the storage container can simultaneously replenish the liquid gas and vaporize the liquid gas into the target gas and output it.

[0015] In addition, the infusion line has a vacuum layer and a heat insulation cotton layer to maintain the temperature of the infusion line and keep the liquid gas in a liquid phase.

[0016] In one feasible embodiment, each liquid supply line is provided with a flow control valve that can adjust the flow rate of the liquid gas, and a first pressure relief valve is provided between the first start valve and the flow control valve, and a second pressure relief valve is provided between the pressurizing pump and the flow control valve.

[0017] Furthermore, the booster pump has two pumps, and when one of the two pumps stops operating, the other of the two pumps can continue to operate independently.

[0018] The control device includes a weight module for obtaining the current weight value and a control module for controlling the plurality of first start valves. The weight module can be set with a weight threshold. When the current weight value is lower than the weight threshold, the weight module will generate a valve opening signal to the control module. After receiving the valve opening signal, the control module will control the corresponding liquid supply system to open the first start valve in the order of receipt, so that the liquid gas flows into the storage container.

[0019] In addition, the weight module can be set with a weight balance value. When the weight difference calculated between the heaviest and lightest of the multiple current weight values ​​is greater than or equal to the weight balance value, the weight module will generate the valve opening signal to the control module. After receiving the valve opening signal, the control module will control the first start valve of the lightest one to open, so that the liquid gas flows into the storage container.

[0020] Furthermore, the weight module can also be set with a target weight value. When the gas supply device enters the liquid replenishment mode, liquid gas will continuously flow into the storage container. When the current weight value returns to the target weight value, the weight module will generate a valve closing signal to the control module. After receiving the valve closing signal, the control module will control the corresponding first start valve to close.

[0021] Finally, the control device also has a control interface in which the weight threshold, the weight balance value, and the weight target value can all be repeatedly set from an original value to a target value.

[0022] The present invention is characterized by having multiple sets of gas supply devices, each of which has a liquid replenishment mode, a gas supply mode, and a mixing mode. The mixing mode is a combination of the liquid replenishment mode and the gas supply mode. In the mixing mode, the storage container can simultaneously replenish the liquid gas and vaporize the liquid gas, enabling the storage container to stably output the target gas and maintain the weight at a safe operating level. In addition, the supply system also has a control device that can control the corresponding first start valve based on the current weight value of each weight sensor, preventing weight imbalance when monitored by the multiple gas supply devices. Simple Explanation of the Diagram

[0023] Figure 1 is a schematic diagram of the bulk liquid gas supply system of the present invention; Figure 2 is a block diagram illustrating the signal transmission of the supply system; Figure 3 is a block diagram illustrating the weight module judgment mechanism; Figure 4A is a schematic diagram of the gas supply device in liquid replenishment mode; Figure 4B is a schematic diagram of the gas supply device in gas supply mode; and Figure 4C is a schematic diagram of the gas supply device in mixed mode. Implementation

[0024] To facilitate a deeper and more detailed understanding of the structure, use, and features of the present invention, preferred embodiments are described below in conjunction with the accompanying drawings:

[0025] The present invention provides a bulk liquid gas supply system designed to vaporize a liquid gas into a stable supply target gas by heating, and to supply the target gas to a semiconductor manufacturing apparatus 1.

[0026] Referring to Figure 1, the bulk liquid gas supply system of the present invention includes a storage tower 2, a liquid supply system 3, multiple gas supply devices 4, a gas supply system 5, and a control device 6. The storage tower 2 is located in an outdoor space and has a large-capacity storage space for storing a liquid gas, while the liquid supply system 3 is connected between the storage tower 2 and the multiple gas supply devices 4 for transporting the liquid gas.

[0027] The liquid supply system 3 includes a liquid delivery pipeline 31 and a booster pump 32 installed in the liquid delivery pipeline 31. One upstream end of the liquid delivery pipeline 31 is connected to the storage tower 2, and one downstream end of the liquid delivery pipeline 31 forms a plurality of parallel liquid supply pipelines 33. Each liquid supply pipeline 33 is provided with a first start valve 34 that can be opened and closed. The booster pump 32 can provide the power for the liquid gas to be transported in the liquid delivery pipeline 31. The booster pump 32 has two pumps 321, which are respectively connected to the liquid delivery pipeline 31. When one of the two pumps 321 fails, the other of the two pumps 321 can still continue to operate independently and maintain the transport of the liquid gas.

[0028] In addition, the infusion pipeline 31 is provided with a vacuum layer and a heat insulation cotton layer to maintain the temperature of the infusion pipeline 31 and keep the liquid gas in a liquid phase during the transportation process. However, the above description of the structure of the vacuum layer and the heat insulation cotton layer is only for illustrative purposes. The vacuum layer and the heat insulation cotton layer can also be replaced with a liquid nitrogen layer or any commercially available cold insulation material to keep the liquid gas in a liquid phase during the transportation process.

[0029] Furthermore, each liquid supply line 33 is equipped with a flow control valve 35 that can adjust the flow rate of the liquid gas. The flow control valve 35 is located between the first start valve 34 and the pressurizing pump 32. A first pressure relief valve 36 is provided between the first start valve 34 and the flow control valve 35, and a second pressure relief valve 37 is provided between the pressurizing pump 32 and the flow control valve 35. The first pressure relief valve 36 is used to release and adjust the pipeline pressure between the flow control valve 35 and the first start valve 34. The second pressure relief valve 37 is used to release the pressure between the pressurizing pump 32 and the flow control valve 35, so as to avoid the stability of the liquid supply due to excessive pressure, thereby maintaining the stable delivery of the overall system.

[0030] Furthermore, the plurality of gas supply devices 4 are connected one-to-one to each liquid supply line 33. Each gas supply device 4 includes a storage container 41, a heater 42, and a weight sensor 43. The storage container 41 has a liquid inlet valve and a gas outlet valve. The liquid inlet valve is located in the lower half of the storage container 41, and the gas outlet valve is located in the upper half of the storage container 41. The liquid inlet valve is connected to the liquid supply line 33, allowing the liquid gas to be introduced into the storage container 41. The heater... 42 is located at the bottom outside the storage container 41. The heater 42 heats the liquid gas input from the inlet valve through changes in magnetic flux, so that the liquid gas is rapidly vaporized into the target gas that can be output from the outlet valve to the gas supply system 5. The weight sensor 43 is located below the storage container 41 and the heater 42. The weight sensor 43 can continuously detect the combined weight of the storage container 41 and the heater 42 and continuously generate a current weight value 431.

[0031] Furthermore, the gas supply system 5 is connected between the plurality of gas supply devices 4 and the semiconductor manufacturing device 1. The gas supply system 5 has a downstream gas supply line 51 and at least one heating line (not shown) for maintaining the temperature of the downstream gas supply line 51. An upstream section of the downstream gas supply line 51 forms a plurality of parallel-arranged upstream gas supply lines 52. Each upstream gas supply line 52 is connected one-to-one with each gas supply device 4, and each upstream gas supply line 52 is provided with a second start valve 53 that can be opened and closed. The heating line can be a commercially available insulation material or a heating strip surrounding the gas supply system 5, so that the target gas does not condense into a liquid state due to temperature changes during the transportation process.

[0032] Please refer to Figure 2. The control device 6 is electrically connected to each first start valve 34, each second start valve 53, each weight sensor 43, and each semiconductor manufacturing device 1. The control device 6 can activate the corresponding first start valve 34 based on the current weight value 431 of each weight sensor 43, thereby allowing the liquid gas to enter the storage container 41; and the control device 6 can activate the second start valve 53, thereby allowing the target gas to be output from the storage container 41.

[0033] The control device 6 includes a weight module 61 for obtaining the current weight value 431, a control module 62 for controlling the plurality of first start valves 34, and a control interface (not shown). The user can set a weight threshold value 63, a weight balance value 64, and a weight target value 65 of the weight module 61 by operating the control interface, and all of these can be repeatedly set from an original value to a target value by the control interface.

[0034] Please refer to Figures 2 and 3. The control module 62 continuously receives the current weight value 431 from each weight sensor 43. When the current weight value 431 is lower than the weight threshold 63, the weight module 61 generates a first valve opening signal 71 to the control module 62. The control module 62 controls the corresponding liquid supply system 3 to open the first start valve 34 in the order of receipt, so that the liquid gas flows into the storage container 41. When the weight difference value 66 calculated from the heaviest and lightest of the plurality of current weight values ​​431 is greater than or equal to the weight balance value 64, the weight module 61 also generates the first valve opening signal 71 to the control module 62. After receiving the first valve opening signal 71, the control module 62 controls the gas supply device 4 of the lightest one to open the first start valve 34, so that the liquid gas flows into the storage container 41.

[0035] Furthermore, when the gas supply device 4 opens the first start valve 34, liquid gas will continuously flow into the storage container 41, and when the current weight value 431 returns to the target weight value 65, the weight module 61 will generate a first valve closing signal 72 to the control module 62. After receiving the first valve closing signal 72, the control module 62 will control the corresponding first start valve 34 to close.

[0036] Furthermore, the opening and closing of the second start valve 53 depends on the current weight value. When the current weight value 431 is lower than the weight threshold value 63, the weight module 61 will generate a second valve closing signal 74 to the control module 62. The control module 62 will, in the order received, control the corresponding gas supply system 5 to close the second start valve 53, causing the storage container 41 to stop outputting the target gas to the semiconductor manufacturing apparatus 1. When the current weight value 431 is equal to or greater than the target weight value 65, the weight module 61 will generate a second valve opening signal 73 to the control module 62. The control module 62 will, in the order received, control the corresponding gas supply system 5 to open the second start valve 53, causing the storage container 41 to output the target gas to the semiconductor manufacturing apparatus 1.

[0037] Please refer to Figures 4A, 4B and 4C. The gas supply device 4 has a liquid replenishment mode S1, a gas supply mode S2 and a mixing mode S3. In the liquid replenishment mode S1, the first start valve 34 will be opened and the second start valve 53 will be closed. In the gas supply mode S2, the first start valve 34 will be closed and the second start valve 53 will be opened.

[0038] The first start valve 34 and the second start valve 53 can be opened simultaneously by the control device 6, so that the gas supply device 4 enters the mixing mode S3. The mixing mode S3 will simultaneously activate the gas supply mode S2 and the liquid replenishment mode S1, so that the storage container 41 can simultaneously replenish the liquid gas and vaporize the liquid gas into the target gas and output it until the current weight value 431 is restored to the target weight value 65, then the first start valve 34 is closed and the system returns to the gas supply mode S2.

[0039] When all of the multiple gas supply devices 4 are activated in the mixed mode S3, the multiple gas supply devices 4 simultaneously open the first start valve 34 to replenish the liquid gas and the second start valve 53 to supply gas until the gas supply device 4 reaches the target weight value 65, at which point the first start valve 34 closes. Throughout the process, the second start valve 53 remains open, thereby ensuring that the target gas supplied to the multiple semiconductor manufacturing devices 1 can maintain a stable pressure.

[0040] 1: Semiconductor manufacturing equipment 2: Storage Tower 3: Liquid supply system 31: Infusion tubing 32: Booster Pump 321: Pump 33: Liquid supply pipeline 34: First starting valve 35: Flow control valve 36: First pressure relief valve 37: Second pressure relief valve 4: Gas supply device 41: Storage container 42: Heater 43: Weight sensor 431: Current weight value 5: Gas supply system 51: Downstream of the gas supply pipeline 52: Upstream of the gas supply pipeline 53: Second start valve 6: Control device 61: Weight Module 62: Control Module 63: Critical weight value 64: Weight balance value 65: Target weight value 66: Weight variation value 71: First valve opening signal 72: First valve closing signal 73: Second valve opening signal 74: Second valve closing signal S1: Replenishing Liquid Mode S2: Gas Supply Mode S3: Hybrid Mode

Claims

1. A bulk liquid gas supply system, comprising: a storage tower having a large-capacity storage space for storing a liquid gas; a liquid supply system having a delivery pipeline and a booster pump disposed on the delivery pipeline, an upstream end of the delivery pipeline being connected to the storage tower, and a downstream end of the delivery pipeline forming a plurality of parallel supply pipelines, each supply pipeline having a first start valve capable of being opened and closed; and a plurality of gas supply devices, each connected one-to-one to each supply pipeline, each gas supply device comprising: A storage container having an inlet valve and an outlet valve, the inlet valve being located in the lower half of the storage container and the outlet valve being located in the upper half of the storage container; a heater being disposed at the bottom outside the storage container, the heater heating the liquid gas input from the inlet valve by means of a change in magnetic flux, causing the liquid gas to vaporize into a target gas output from the outlet valve; and a weight sensor being disposed below the storage container, the weight sensor being capable of detecting a current weight value of the storage container; A gas supply system includes a downstream gas supply line and at least one heating line for maintaining the temperature of the downstream gas supply line. An upstream section of the downstream gas supply line forms a plurality of parallel-connected upstream gas supply lines, each upstream gas supply line having an openable / closeable second start valve. A control device is electrically connected to each first start valve, each second start valve, and each weight sensor. The control device can activate the corresponding first start valve based on the current weight value of each weight sensor, thereby allowing the liquid gas to enter the storage container. The control device can also activate the second start valve, thereby allowing the target gas to exit the storage container. The control device further includes a weight module for obtaining the current weight value and a control module for controlling the plurality of first start valves. The control module of the valve can be set with a weight threshold. When the current weight value is lower than the weight threshold, the weight module will generate a valve opening signal to the control module. After receiving the valve opening signal, the control module will control the corresponding liquid supply system to open the first start valve in the order of receipt, so that the liquid gas flows into the storage container. The weight module can also be set with a weight balance value. When the weight difference calculated from the heaviest and lightest of the multiple current weight values ​​is greater than or equal to the weight balance value, the weight module will generate a valve opening signal to the control module. After receiving the valve opening signal, the control module will control the first start valve of the lightest value to open, so that the liquid gas flows into the storage container. The gas supply device has a liquid replenishment mode, a gas supply mode, and a mixing mode. In the liquid replenishment mode, the first start valve is opened and the second start valve is closed. In the gas supply mode, the first start valve is closed and the second start valve is opened. In the mixing mode, the first start valve and the second start valve can be opened simultaneously, so that the storage container can simultaneously replenish the liquid gas and vaporize the liquid gas into the target gas and output it.

2. A bulk liquid gas supply system as described in claim 1, wherein, The infusion tubing has a vacuum layer and a heat insulation cotton layer on the outside to maintain the temperature of the infusion tubing and keep the liquid gas in a liquid phase.

3. A bulk liquid gas supply system as described in claim 1, wherein, Each liquid supply line is equipped with a flow control valve that can adjust the flow rate of the liquid gas.

4. A bulk liquid gas supply system as described in claim 3, wherein, There is a first pressure relief valve between the first start valve and the flow control valve, and there is a second pressure relief valve between the pressurizing pump and the flow control valve.

5. A bulk liquid gas supply system as described in claim 1, wherein, The booster pump has two pumps, and when one of the two pumps stops operating, the other of the two pumps can continue to operate independently.

6. A bulk liquid gas supply system as described in claim 1, wherein, The weight module can also be set with a target weight value. When the gas supply device enters the liquid replenishment mode, liquid gas will continuously flow into the storage container. When the current weight value returns to the target weight value, the weight module will generate a valve closing signal to the control module. After receiving the valve closing signal, the control module will control the corresponding first start valve to close.

7. A bulk liquid gas supply system as described in claim 6, wherein, The control device also has a control interface in which the weight threshold, the weight balance value and the weight target value can be repeatedly set from an original value to a target value.

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