Semiconductor manufacturing equipment

TW202642103APending Publication Date: 2026-10-16PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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Patent Information

Application Number
TW114128681
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-07
Filing Date
2025-07-29
Publication Date
2026-10-16

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Abstract

A semiconductor manufacturing apparatus includes: a worktable for holding a workpiece; a work head disposed above the worktable and performing a predetermined operation on the workpiece held by the worktable; a cover member having a top surface and a side surface, and accommodating the worktable and the work head in a space defined by the top surface and the side surface; a fan filter unit for supplying air to the space; and an exhaust assembly for discharging air from the space. The fan filter unit is disposed on the top surface or side surface of the cover member, and the exhaust assembly is disposed above the work head.
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