Indirect reflective metrology for surface condition measurement

TW202642123APending Publication Date: 2026-10-16APPLIED MATERIALS INC
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Patent Information

Application Number
TW114150066
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-20
Filing Date
2025-12-19
Publication Date
2026-10-16

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Abstract

Embodiments described herein relate to a method that includes emitting a beam from a laser into a first end of a channel within a workpiece, and detecting an intensity of the beam with a camera at a second end of the channel. In an embodiment, the first end of the channel and the second end of the channel are on the same surface of the workpiece, and the channel is curved. In an embodiment, the method further includes determining if the intensity of the beam is below a predetermined threshold
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