Monitoring system and its monitoring method, optical system and its operating method

Abstract

A monitoring system and a monitoring method, an optical system and an operating method. The monitoring system includes a first optical assembly, a second optical assembly, and an adjustment module. The adjustment module is configured to synchronously adjust the rotation angles of the first reflecting mirror and the second reflecting mirror relative to the normal plane of a sample surface, so that the first signal light from points on the sample, is collected by the same position of the first detector. Wherein, the points have different heights along the direction perpendicular to the sample surface and have the same position along the sample surface. The first signal light is formed by the reflection of the first illumination light. The system can improve the detection precision of the sample surface.

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