Method of operating a reflective-mode fourier ptychographic microscope (RFPM)

TW202642155APending Publication Date: 2026-10-16LAM RES CORP
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Patent Information

Application Number
TW115126694
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2019-12-02
Filing Date
2020-12-01
Publication Date
2026-10-16

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Abstract

Various embodiments include reflective-mode Fourier ptychographic microscope (RFPM) apparatuses and methods for using the RFPM. In one example, the RFPM includes a multiple-component light source configured to direct radiation to a surface. The multiple-component light source has a number of individual-light sources, each of which is configured to be activated individually. The RFPM further includes collection optics to receive radiation reflected and scattered or otherwise redirected from the surface, and a sensor element to convert received light-energy from the collection optics into an electrical-signal output. Other apparatuses, designs, and methods are disclosed.
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