Method for assessing and compensating for positioning errors during combined rotational and translational positioning

TW202642161APending Publication Date: 2026-10-16CARL ZEISS SMT GMBH
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Patent Information

Application Number
TW114149805
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-23
Filing Date
2025-12-18
Publication Date
2026-10-16

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Abstract

A method for providing data for the rotation-dependent position correction of a sample comprises rotating the sample about a rotation axis with respect to at least one rotation angle; recording at least one first planar recording of a first location of the sample for the at least one rotation angle; recording at least one second planar recording of a second location of the sample for the at least one rotation angle; and providing the data for the rotation-dependent position correction of the sample at least partially on the basis of the first and second planar recordings.
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