Method of operating a test apparatus

TW202642164APending Publication Date: 2026-10-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114120679
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-04
Filing Date
2025-06-03
Publication Date
2026-10-16

Smart Images

  • Figure TWG2TA001080447_001
    Figure TWG2TA001080447_001
  • Figure TWG2TA001080447_002
    Figure TWG2TA001080447_002
  • Figure TWG2TA001080447_003
    Figure TWG2TA001080447_003
Patent Text Reader

Abstract

A method of operating a test apparatus comprises: providing a cantilever-card assembly that includes a cantilever holder structure attached to a bottom of a probe card, cantilever probe needles having first end portions embedded within the cantilever holder structure, at least one auxiliary circuit board that is attached to the cantilever holder structure, and electrical components attached to the at least one auxiliary circuit board; positioning a semiconductor wafer including semiconductor devices under the cantilever probe needles; disposing the cantilever probe needles on test pads on the semiconductor wafer; and generating data representing electrical characteristics of the semiconductor devices.
Need to check novelty before this filing date? Find Prior Art