Semiconductor testing equipment and inspection system

Abstract

The tester 2 of the present invention includes: a card guide 20 extending vertically in each slot 13 and having a groove 21 for inserting a side end 11e of a substrate unit 11; and a guide block 30 located above the card guide 20, extending along the arrangement direction of the substrate units 11 such that it overlaps with the plurality of card guides 20 when viewed from above. The guide block 30 has: a recess 31 that exposes the groove 21 of the card guide 20 when viewed from above, and is individually provided for each card guide 20; and a substrate unit temporary placement surface 34 located between adjacent recesses 31 when viewed from above, for temporarily placing the substrate unit 11. none

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