Method for fabricating an optical component

Abstract

A method for fabricating an optical component includes: performing a patterned process to a first surface of a substrate to form a first trench, a second trench and a die on the substrate, in which the die is between the first and second trenches; performing a first polishing process to the substrate and the die; depositing an optical layer on the substrate and the die; forming a pre-fixed material layer and a fixed plate layer on the optical layer, in which the pre-fixed material layer is between the optical layer and the fixed plate layer; performing a second polishing process to a second surface of the substrate to expose the pre-fixed material layer; and removing the pre-fixed material layer and the fixed plate layer to obtain an optical component.

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