Information processing methods, computer programs and information processing devices

Abstract

This invention provides an information processing method, computer program, and information processing apparatus that promise to perform various high-precision processing on images captured from a substrate after substrate processing. The information processing method of this embodiment involves the information processing apparatus performing the following steps: acquiring an image of the substrate after substrate processing; performing a first processing step, namely, generating a high-resolution image by upscaling the acquired image using a learned super-resolution model; and performing a second processing step on the high-resolution image generated by the first processing step, using the learned model.

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