Charged particle beam device and its lens intensity determination method

Abstract

[Problem to be solved] To achieve a wider field of view in the captured images and improved discrimination of the observed objects. [Solution] The charged particle beam device (100) includes: a deflector for separating the charged particle beam emitted from the sample from the signal electrons generated based on the irradiated charged particle beam; a filter for filtering the signal electrons; a first lens for parallelizing the direction of travel of the signal electrons separated by the deflector and causing them to be incident on the filter; a second lens for converging the signal electrons passing through the filter; a detector for detecting the signal electrons passing through the second lens; and a computer system (401) for controlling the intensity of the first lens and the intensity of the second lens. The computer system (401) changes the intensity of the first lens so that the signal electrons are incident on the filter at a certain angle, and changes the intensity of the second lens so that the signal electrons passing through the filter are converged on the detector.

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