Multi-beam imaging method with reduced impact of surface charging

TW202642565APending Publication Date: 2026-10-16CARL ZEISS MULTISEM GMBH
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Patent Information

Application Number
TW115104392
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-06
Filing Date
2026-02-04
Publication Date
2026-10-16

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Abstract

A method of operating a multi-beam charged particle system with pre-charging a pre-charging area exceeding an area for image acquisition is provided. With the method, an edge effect of a charging during image acquisition is reduced.
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