Impedance matching method, impedance matching module, and semiconductor process equipment

Abstract

The present application provides an impedance matching method applied to radio frequency power sources, which can solve the problems of inappropriate initial sweep frequency selection and long matching times. The impedance matching method includes: obtaining the power frequency of the i-th pulse signal in the first cycle, where the i-th pulse signal is a pulse signal matched by adjusting the matcher; based on the power frequency of the i-th pulse signal in the first cycle and the preset adjustment parameters of the remaining pulse signals (excluding the i-th pulse signal), obtaining the initial sweep frequency of each pulse signal and using it as the current sweep frequency; controlling the RF power source to perform sweep matching for each of the remaining pulse signals according to the current sweep frequency.

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