Processing tool with high bandwidth architecture for centralized coherent control
TW202642573APending Publication Date: 2026-10-16APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW115124295
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-05-05
- Filing Date
- 2023-04-20
- Publication Date
- 2026-10-16
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Abstract
Embodiments disclosed herein include a processing tool. In an embodiment, the processing tool comprises a power supply, an impedance matching network coupled to the power supply, a cathode, wherein the power supply is configured to supply power through the impedance matching network to the cathode, and a processing module, wherein the processing module is communicatively coupled to the power supply and the impedance matching network.
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