Air-cooled optical modules, laser systems having optical modules, methods for operating laser systems, methods for generating target plasma, and methods for manufacturing microwafers or semiconductor intermediates.

Abstract

This application relates to an optical module (1) having a housing (2) and an optical element (3) housed therein. The housing (2) has a plurality of elongated recesses (14) extending axially (7) and opening toward the optical element (3) on its inner side (8) facing the optical element (3) for guiding cooling gas to cool the optical element (3). This application also relates to a laser system (20) having such an optical module (1). This application further relates to a method (33) for operating the laser system (20), for generating plasma (29) of a target (29) to generate secondary radiation (30), and for manufacturing microwafers or semiconductor intermediates.

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