Method of manufacturing acoustic wave device

Abstract

A method of manufacturing an acoustic wave device according to the present invention comprises the steps of: forming an electrode on a piezoelectric substrate; forming a protective layer frame body surrounding the electrode; forming a sacrificial layer on the electrode by applying a sacrificial liquid thereon; forming a protective layer lid body on the sacrificial layer; and heating and removing the sacrificial layer to form an air gap, wherein the sacrificial liquid comprises a polymer and a solvent, and the polymer has a glass transition temperature of from

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