Cleaning equipment, methods and procedures for using cleaning equipment

Abstract

The object of the present invention is to improve the convenience of the cleaning apparatus. To achieve the above object, the cleaning apparatus of the present invention includes: a processing space forming part that forms a processing space for cleaning a substrate; a brush that has a sliding surface that slides relative to the substrate for cleaning the substrate in the processing space; and a camera mechanism that is disposed on one side opposite to a transparent window in an area demarcated from the processing space and has a camera that captures images of the sliding surface of the brush located on the other side of the window through the window.

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