Edge washing device and edge washing method

Abstract

This disclosure provides an edge cleaning device, comprising: a nozzle for spraying chemical liquid to clean the edges of a substrate; a support platform for supporting the substrate and rotating the substrate; a moving element for moving the nozzle; and a control module configured to: control the moving element to drive the nozzle to move linearly in one direction, so that the application point of the chemical liquid sprayed by the nozzle is always kept on the edge cleaning line of a preset width, until all edges of the substrate are cleaned, wherein when switching between cleaning two adjacent substrate edges, the substrate is controlled to rotate 90 degrees.

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