Elastic self-sealing and non-return valve vacuum pad

Abstract

The present invention relates to an elastic self-sealing and non-return valve vacuum pad, which includes: a coupling section with a vent hole passing through it; a disc section that includes a base and a vacuum pad. The base protrudes around one side of the coupling section and has a top surface and a bottom surface opposite to each other. A chamber is formed around the area between the base and the coupling section. The top surface is perforated with multiple air intake holes that communicate with the chamber, while the bottom surface features a protruding plug section. The vacuum pad is arranged around the base. When the base bends toward the coupling section, the plug section seals the vent hole. When multiple units of the present invention are applied to a robotic arm for wafer adsorption, the robotic arm evacuates air to make the wafer adhere to the vacuum pads. If some vacuum pads fail to properly adhere to the wafer, resulting in air leakage, the top portion bends toward the coupling section due to the suction force until the plug section seals the vent hole. This mechanism prevents external air from continuously being drawn in, thereby avoiding vibrations in the robotic arm. As a result, the invention effectively prevents wafer damage or detachment from the robotic arm.

Description

[Technical Field]

[0001] This invention relates to a suction cup, and more particularly to a suction cup that carries an object by means of negative pressure. [Previous Technology]

[0002] In the current semiconductor industry, one of the methods for transporting wafers is to use a robotic arm equipped with multiple suction cups. After placing the wafer on each suction cup, the suction cups perform an air suction action. The negative pressure generated by each suction cup causes the wafer to be pressed tightly against each suction cup of the robotic arm by atmospheric pressure.

[0003] However, since the size of the robotic arm and the position of each suction cup are fixed, when receiving wafers of different sizes, the wafer may warp due to errors in the movement of the robotic arm or deviations in the angle of wafer picking, and thus may not be able to be completely and properly adsorbed by all suction cups. In other words, some suction cups may continuously suck in gas from the outside due to air leakage. Continuous gas sucking will cause vibration of the robotic arm, which may lead to wafer damage or even the wafer detaching from the robotic arm. Therefore, the existing suction cups have the aforementioned problems and shortcomings in their overall structure and need to be improved. [Summary of the Invention]

[0004] In view of the shortcomings of the prior art, the present invention provides an elastically opening and closing anti-reverse suction cup, which can block the gas connection through structural deformation in the event of gas leakage, thereby preventing gas leakage.

[0005] To achieve the above-mentioned objective, the technical means adopted by the present invention is to design an elastically opening and closing anti-reverse suction cup, which is used to be disposed in an air intake hole. The elastically opening and closing anti-reverse suction cup includes: a connecting part through which a vent hole is passed, the connecting part being disposed in the air intake hole and the vent hole communicating with the air intake hole; a disc part having a base and a suction cup, the base being circumferentially protruding on one side of the connecting part and having a top surface and a bottom surface opposite to each other, the base and the connecting part forming a chamber, the top surface having a plurality of air inlets passing through it, each air inlet communicating with the chamber, the bottom surface having a protruding plug, the shape and position of the plug corresponding to the shape and position of the vent hole, the suction cup being circumferentially protruding on the base, and when the base is bent toward the connecting part, the plug can seal the vent hole.

[0006] Furthermore, in the elastic opening and closing anti-reverse suction cup, the joint portion is further formed with a plurality of air storage grooves, each of which is recessed on one side of the joint portion.

[0007] Furthermore, in the elastic opening and closing anti-reverse suction cup, each of the air storage grooves and each of the air inlets are staggered vertically.

[0008] Furthermore, in the elastic opening and closing anti-reverse suction cup, the base has a top at the other end of the joint, the top is a planar structure and the top surface and the bottom surface are respectively located on the upper and lower opposite sides of the top, and the top is made of an elastic material.

[0009] Furthermore, in the elastic opening and closing anti-reverse suction cup, the plug portion is a cylinder.

[0010] Furthermore, the elastic opening and closing anti-reverse suction cup is a disc-shaped body, and the inner diameter of its opening gradually decreases in the direction of the joint.

[0011] The advantage of the present invention is that when it is applied to the robot arm to perform the air extraction action, if the wafer is not properly adsorbed and air leakage occurs, the top will bend towards the joint due to the suction force until the plug blocks the vent hole to prevent air leakage. This can prevent the continuous intake of external gas and avoid the robot arm from vibrating, thereby preventing the wafer from being damaged or detached from the robot arm.

Implementation Method

[0012] The following, in conjunction with the accompanying drawings and preferred embodiments of the present invention, further illustrates the technical means adopted by the present invention to achieve the intended inventive objective.

[0013] Please refer to Figure 1. The elastic opening and closing anti-reverse suction cup of the present invention includes a connecting part 10 and a disc part 20, with the disc part 20 protruding from the connecting part 10.

[0014] Please refer to Figures 2, 3 and 6. The joint 10 is a single piece, which forms a vent 11 and a plurality of air storage grooves 12. The vent 11 penetrates the joint 10. Each air storage groove 12 is recessed on one side of the joint 10 and arranged in a circumferential interval. However, this is not a limitation, and air storage grooves 12 may not be formed.

[0015] Please refer to Figures 1, 3, and 4. The disc portion 20 has a base 21 and a suction cup 22. The base 21 is circumferentially protruding from one side of the connecting portion 10, and the base 21 surrounds the vent hole 11 and each air storage tank 12. The other end of the base 21 relative to the connecting portion 10 forms a top 211. The top 211 has a planar structure and has a top surface 212 and a bottom surface 213 that are opposite each other. A chamber 214 is formed between the base 21 and the connecting portion 10. A plurality of air inlets 215 penetrate the top 211. Each air inlet 215 is connected to the chamber 214. The air inlets 215 are arranged in a circumferential interval, and the position of each air inlet 215 is vertically staggered from the position of each air storage tank 12. In other words, The air inlet 215 and the air storage tank 12 are not located on the same axial straight line. A plug 216 is protruding from the bottom surface 213 of the top 211. In this embodiment, the plug 216 is a cylinder, but it is not limited to this. The shape and position of the plug 216 correspond to the shape and position of the air vent 11. The suction cup 22 is protruding around the top 211 of the base 21. Specifically, the suction cup 22 is a disc-shaped body. The inner diameter of its opening gradually decreases towards the top 211, but it is not limited to this. It can also be other shapes. In this embodiment, the disc part 20 and the connecting part 10 are made of elastic material, but it is not limited to this. The material selection can be changed according to the user's needs. When the top 211 bends towards the connecting part 10, the plug 216 can seal the air vent 11.

[0016] When multiple embodiments of the present invention are used in a robotic arm (not shown in the figures), each of the connecting parts 10 of the present invention can be combined and fixed with each air intake hole (not shown in the figures) of the robotic arm, so that the vent hole 11 is connected to the air intake hole. Please refer to Figure 4. When performing the air extraction operation, external gas can enter the chamber 214 through each air intake hole 215, and then flow from the chamber 214 into the vent hole 11. When a wafer (not shown in the figures) is placed above each suction cup 22, the space surrounding the wafer and the suction cup 22 is... Most of the gas in the chamber 214 is extracted, thus creating a negative pressure inside. This allows the wafer to adhere to the suction cup 22 of the present invention by atmospheric pressure. At this time, if part of the present invention is not properly adsorbed onto the wafer and leaks air, as shown in Figure 5, the top 211 will bend towards the joint 10 due to the suction until the plug 216 blocks the vent 11. This prevents the continuous intake of external gas, avoids vibration of the robot arm, and thus prevents the wafer from being damaged or detached from the robot arm.

[0017] During the aforementioned process, since the joint 10 forms an air storage groove 12, when the chamber 214 is in a negative pressure state, some gas will remain in the air storage groove 12, which helps the base 21 to return to its original state from the bent state by its own elastic force when the robot stops pumping air.

[0018] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Anyone skilled in the art can make some modifications or alterations to the above-disclosed technical content as equivalent embodiments without departing from the scope of the technical solution of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of the technical solution of the present invention. [Simplified Explanation of the Diagram]

[0019] Figure 1 is a perspective view of the present invention. Figure 2 is another perspective view of the present invention. Figure 3 is a perspective cross-sectional view of the present invention. Figure 4 is a cross-sectional view of the present invention. Figure 5 is a cross-sectional view of the present invention after the top is bent. Figure 6 is a top view of the joint of the present invention.

Claims

1. A flexible opening and closing check suction cup for use in an air intake, the flexible opening and closing check suction cup comprising: a connecting portion having a vent hole through it, the connecting portion being disposed in the air intake and the vent hole communicating with the air intake; a disc portion having a base and a suction cup, the base being circumferentially protruding from one side of the connecting portion and having a top surface and a bottom surface opposite to each other, the base and the connecting portion forming a chamber, the top surface having a plurality of air inlets through it, each air inlet communicating with the chamber, the bottom surface having a protruding plug portion, the shape and position of the plug portion corresponding to the shape and position of the vent hole, the suction cup being circumferentially protruding from the base, the plug portion sealing the vent hole when the base bends toward the connecting portion.

2. The resilient opening and closing anti-reverse suction cup as described in claim 1, wherein the joint portion further forms a plurality of air storage grooves, each of the air storage grooves being recessed on one side of the joint portion.

3. The resilient opening and closing anti-reverse suction cup as described in claim 2, wherein each of the air storage tanks and each of the air inlets are vertically offset.

4. The resilient opening and closing anti-reverse suction cup as described in any one of claims 1 to 3, wherein the base forms a top relative to the other end of the joint, the top being a planar structure and the top surface and the bottom surface being located on opposite upper and lower sides of the top, the top being made of a resilient material.

5. The resiliently opening and closing check valve as described in claim 1, wherein the plug portion is cylindrical.

6. The resilient opening and closing anti-reverse suction cup as described in claim 1, wherein the suction cup is a disc-shaped body and the inner diameter of its opening gradually decreases in the direction of the joint.

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