Moving system, opening and closing mechanism and moving method
TW202642964APending Publication Date: 2026-10-16TOKYO ELECTRON LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW115104572
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-14
- Filing Date
- 2026-02-05
- Publication Date
- 2026-10-16
Smart Images

Figure TWG2TA001081077_001 
Figure TWG2TA001081077_002 
Figure TWG2TA001081077_003
Abstract
A mobile system comprising: a first housing having a first bottom having a first bottom surface and having a first space inside, the first bottom surface facing the first space; a second housing having a second space inside; a connecting channel connecting the first space and the second space and for allowing at least a portion of the mobile body to enter from the first space into the second space; and an opening and closing mechanism comprising: a valve body; a moving mechanism for moving the valve body between an opening region for opening the connecting channel and a closing region for closing the connecting channel; and a driving bottom having a driving bottom surface exposed in the closing region when the valve body is in the opening region and for moving the mobile body between above the driving bottom surface and above the first bottom surface.
Need to check novelty before this filing date? Find Prior Art
