Chuck device and manufacturing method of chuck device

TW202642976APending Publication Date: 2026-10-16SODICK CO LTD
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Patent Information

Application Number
TW115109343
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-09
Filing Date
2026-03-13
Publication Date
2026-10-16

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Abstract

To provide a chuck device configured to be temperature-controllable, in which the occurrence of temperature variation is suppressed. A chuck device
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