Defect detection via pattern segmentation for applications including array hot spot detection

Abstract

Methods and systems for detecting defects on a specimen are provided. One method includes separating images generated for a specimen by an inspection subsystem into first and second segments predefined based on noisiness of patterns in the images and determining first and second statistical values for the first and second segments, respectively. The method also includes determining first and second defect detection thresholds for the first and second segments, respectively. The function used for determining the defect detection thresholds is the same. The method further includes detecting defects on the specimen by separately applying a defect detection method to the first and second segments with the first and second defect detection thresholds, respectively.

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