Information processing methods, computer programs, information processing devices, and information processing systems

Abstract

This invention provides an information processing method, computer program, information processing apparatus, and information processing system, which can be expected to support users who analyze substrate processing record data. The information processing method of this embodiment involves the information processing apparatus performing the following steps: obtaining data as the object of analysis from a database storing record data related to substrate processing performed by the substrate processing apparatus; accepting a selection of an analysis program from a plurality of analysis programs for analysis; and performing analysis on the obtained data using the selected analysis program and outputting the analysis results.

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