Mover module for linear servo motor

TWD246213SActive Publication Date: 2026-08-11MITSUBISHI ELECTRIC CORP
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Patent Information

Application Number
TW115301763
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-10-14
Filing Date
2026-04-09
Publication Date
2026-08-11
Estimated Expiration
2041-04-08

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  • Figure TWG2TB001906573_001
    Figure TWG2TB001906573_001
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    Figure TWG2TB001906573_002
  • Figure TWG2TB001906573_003
    Figure TWG2TB001906573_003
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Abstract

【Item Uses】 This item is a module for a movable part of a linear servo motor used in semiconductor manufacturing equipment, etc., and multiple modules can be connected together for use. 【Design Description】 The solid lines in the diagram represent the parts for which this design is intended, while the dashed lines represent the parts for which this design is not intended.
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Citation Information

Patent Citations

  • Servo motor type voltage regulator

    CN302973704S

  • Controller for servo motor drive (4)

    TW252028S

  • Portion of backplane for servo motor drive

    TWD223981S

  • USD1047909

  • USD1085004