wafer holding cell
TWD246774SActive Publication Date: 2026-09-21SCREEN HOLDINGS CO LTD
Patent Information
- Application Number
- TW114304179D01
- Authority / Receiving Office
- TW · TW
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2025-07-16
- Filing Date
- 2025-09-11
- Publication Date
- 2026-09-21
- Estimated Expiration
- 2040-09-10
Abstract
【Item Uses】 The item designed in this case is installed on a wafer transport device and is used by the user as a wafer holding part in the wafer transport device. 【Design Description】 The dotted lines in the drawings represent the parts that are not recommended for design in this case. The rear view is omitted because it is displayed identically to the front view, the bottom view to the top view, and the left view to the right view. This design is novel and unique. By uniquely designing the wafer holding unit, it can display visual effects that were not seen in previous technologies.
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Citation Information
Patent Citations
Baffle for substrate processing system
TWD235077S
