wafer holding cell

TWD246774SActive Publication Date: 2026-09-21SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
TW114304179D01
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-07-16
Filing Date
2025-09-11
Publication Date
2026-09-21
Estimated Expiration
2040-09-10
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Abstract

【Item Uses】 The item designed in this case is installed on a wafer transport device and is used by the user as a wafer holding part in the wafer transport device. 【Design Description】 The dotted lines in the drawings represent the parts that are not recommended for design in this case. The rear view is omitted because it is displayed identically to the front view, the bottom view to the top view, and the left view to the right view. This design is novel and unique. By uniquely designing the wafer holding unit, it can display visual effects that were not seen in previous technologies.
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Citation Information

Patent Citations

  • Baffle for substrate processing system

    TWD235077S