Process chamber collimator

TWD246920SActive Publication Date: 2026-10-01APPLIED MATERIALS INC
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Patent Information

Application Number
TW113304728
Authority / Receiving Office
TW · TW
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-03-21
Filing Date
2024-09-13
Publication Date
2026-10-01
Estimated Expiration
2039-09-12

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  • Figure TWG2TB001913659_001
    Figure TWG2TB001913659_001
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    Figure TWG2TB001913659_002
  • Figure TWG2TB001913659_003
    Figure TWG2TB001913659_003
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Abstract

【Item Uses】 The design request concerns the processing of the chamber collimator. 【Design Description】 The dotted lines shown in the diagram represent the parts that are not recommended for design in this case.
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Citation Information

Patent Citations

  • Collimator for use in a physical vapor deposition (PVD) chamber

    TWD224691S

  • Collimator for use in a physical vapor deposition (PVD) chamber

    TWD227585S