Part of shower plate

Abstract

【Item Uses】 The article used in this design is used in a plasma reactor apparatus used in the manufacture of semiconductors, etc., to inject plasma excitation gas into the processing chamber of this plasma reactor. The spray plate of the article used in this design is arranged with its front view side facing the processing chamber. The part of the design to be claimed in this application is the nozzle portion of the spray plate that ejects the gas. 【Design Description】 The parts indicated by solid lines represent the design aspects for which this application seeks to claim a design, while the parts indicated by dashed lines represent the parts for which this application does not claim a design. The left-side view is omitted because it is symmetrical to the right-side view. The top view is omitted because it is symmetrical to the bottom view. The enlarged view of section D is an enlarged view of the part circled in the cross-sectional view along reference line AA (section D). The enlarged view of the front view is an enlarged view of the hole seen from the direction indicated by arrow E in the enlarged view of section D. The enlarged view of the rear view is an enlarged view of the hole seen from the direction indicated by arrow F in the enlarged view of section D.

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