Pressurizing apparatus

Abstract

This invention provides a pressurizing device that reduces the workload of operators when changing frame components and also reduces the processing risks of frame components during manufacturing. The pressurizing device (1) of this invention has a pair of pressurizing units (2, 3) for clamping and pressurizing an object W. One of the pressurizing units (2) includes a pressurizing pad (25) and a frame member (26). The pressurizing pad (25) has a flexible body (251) that deforms according to the surface shape of the object being pressurized. The frame member (26) holds the pressurizing pad. The frame member includes: a first frame member (26a) configured to surround the entire circumference of the flexible body and hold the flexible body; a second frame member (26b) for detachably mounting the first frame member; and a third frame member (26c) configured to surround the entire circumference of the first frame member and detachably mounted to the second frame member, fixing the first frame member to the second frame member. In the horizontal direction, the third frame member abuts against the first frame member and the second frame member.

Description

[Technical Field]

[0001] This invention relates to a pressurization device. [Previous Technology]

[0002] A pressure device is known for applying pressure to an object composed of multiple electronic components (substrates, circuit elements), etc. (for example, see Patent Document 1). This device has an upper pressure unit and a lower pressure unit. The object to be pressured is disposed between the upper and lower pressure units. The upper pressure unit includes a base member, an upper mold, a pressure pad, a frame member, and a spring member. The base member holds the upper mold and the spring member. The upper mold and the base member move downwards together, and the object to be pressured is pressurized by the pressure pad. The frame member is held by the spring member in a manner that allows relative movement with respect to the upper mold in the vertical direction. The frame member holds the flexible pressure pad. When the object to be pressured is pressed by the upper mold, the pressure pad deforms according to the shape of the object to be pressured, applying uniform pressure to the object. The lower pressure unit includes a lower mold. The object to be pressured is placed on the surface of the lower mold. When the object to be pressurized is pressurized by the upper mold, the object to be pressurized is clamped by the pressure pad and the lower mold and pressurized.

[0002] [Previous Technical Documents]

[0002] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2007-896

[0004] When the pressurized object is pressurized by the upper mold, the pressure pad applies approximately uniform pressure in all directions. Therefore, when the pressurized object is pressurized under high pressure, the high pressure also acts on the frame members holding the pressure pad. Therefore, the length of the frame members in the horizontal direction is designed to withstand high pressure. That is, the length of the frame members in the horizontal direction increases with the increase of the pressure applied to the frame members. As a result, the size of the frame members increases, and the weight of the frame members also increases. Since the pressure pad is replaced periodically according to the number of uses, if the weight of the frame members increases, it will increase the workload of the operator when disassembling and assembling the frame members to replace the pressure pad.

[0005] Furthermore, when the length of the frame member in the horizontal direction increases, it becomes difficult to ensure the flatness of the flat surface of the frame member due to processing risks such as warping and difficulty in ensuring processing accuracy. In particular, if the flatness of the flat surface abutting the mounting platform cannot be ensured, the uniformity of pressure of the pressure pad on the pressurized object cannot be ensured during the pressurization process. As a result, the position of the pressurized object may shift, thereby failing to maintain the quality of the pressurized object. Thus, during the manufacture of the frame member, technical problems may arise, such as increased processing risks including warping of the frame member and difficulty in ensuring the processing accuracy of the frame member.

[0006] The purpose of this invention is to reduce the workload of operators when replacing frame components, and to reduce the processing risks such as warping of frame components and difficulty in ensuring the processing accuracy of frame components during manufacturing.

[0007] One embodiment of the present invention is a pressurizing device that clamps and pressurizes an object in the vertical direction. It has a pair of pressurizing units arranged opposite each other in the vertical direction to clamp and pressurize the object. One of the pressurizing units comprises: a pressurizing pad having a flexible body that deforms according to the surface shape of the object when it is pressurized; and a frame member that holds the pressurizing pad. The frame member comprises: a first frame member arranged in the horizontal direction to surround the entire circumference of the flexible body and hold the flexible body; a second frame member for detachably mounting the first frame member; and a third frame member arranged in the horizontal direction to surround the entire circumference of the first frame member and detachably mounted on the second frame member, fixing the first frame member to the second frame member. In the horizontal direction, the third frame member abuts against the first frame member and the second frame member.

[0008] According to the present invention, the workload of operators when replacing frame components can be reduced, and the processing risks such as warping of frame components and difficulty in ensuring the processing accuracy of frame components during manufacturing can be reduced. [Simplified Explanation of the Diagram]

[0009] Figure 1 is a conceptual diagram showing the pressing step of the pressurized object in the pressurizing device of the present invention. (a) shows the state of the pressurized object disposed on the platform. (b) shows the state of the pressurizing pad abutting against the pressurized object. (c) shows the state of the pressurizing pad deforming in accordance with the shape of the pressurized object.

[0009] Figure 2 is a schematic cross-sectional view showing an embodiment of the pressurization device of the present invention.

[0009] Figure 3 is a partially enlarged schematic cross-sectional view of the frame components of the pressurization device in Figure 2.

[0009] Figure 4 is a bottom view showing the state of the frame components of the pressurizing device in Figure 2 when viewed from below.

[0009] Figure 5 is an enlarged schematic cross-sectional view showing the separated state of the first frame member, the second frame member, and the third frame member constituting the frame members of Figure 3.

[0009] Figure 6 is a bottom view showing the state of the first frame member that constitutes the frame members of Figure 4 when viewed from below.

[0009] Figure 7 is a bottom view showing the state of the second frame member that constitutes the frame member of Figure 4 when viewed from below.

[0009] Figure 8 is a bottom view showing the state of the third frame member that constitutes the frame members of Figure 4 when viewed from below.

[0009] Figure 9 is a schematic cross-sectional view showing the state in which the upper pressurizing unit of the pressurizing device in Figure 2 is lowered and the side member of the upper pressurizing unit abuts against the platform of the lower pressurizing unit.

[0009] Figure 10 is a schematic cross-sectional view showing the state in which the upper pressure unit is lowered from the state shown in Figure 9, and the pressurized object is pressurized by the mold above the upper pressure unit through the pressure pad.

[0009] Figure 11 is an enlarged schematic cross-sectional view showing the state under pressure as shown in Figure 10.

Implementation Method

[0010] Hereinafter, embodiments of the pressurizing device of the present invention (hereinafter referred to as "the device") will be described. In the following description, reference numerals will be used appropriately. In the following description, components having the same structure or function will be labeled with the same numerals, and repeated descriptions will be omitted. Furthermore, the dimensional proportions of each component are not limited to those shown in the drawings.

[0011] In the following description and drawings, unless otherwise specified, this device is always installed on a horizontal surface. In this device, the horizontal direction refers to the direction parallel to the horizontal plane of the ground, and the vertical direction refers to the direction perpendicular to the horizontal plane. In the vertical direction, "down" refers to the direction of the ground relative to this device, and "up" refers to the opposite direction to "down". "Down" is an example of the third direction in this invention, and "up" is an example of the fourth direction in this invention.

[0012] ●Pressure device●

[0012] ●Crimping steps of the pressurized object

[0012] First, as an example of pressurization in this device, the pressing step of the pressurized object in this device will be explained as follows.

[0013] Figure 1 is a conceptual diagram showing the pressing steps of the pressurized material W in this device 1 (see Figure 2; the same below). Figure 1(a) shows the state of the pressurized material W disposed on the mounting stage 31 (see Figure 2; the same below). Figure 1(b) shows the state of the pressure pad 25 abutting against the pressurized material W. Figure 1(c) shows the state of the pressure pad 25 deforming in accordance with the shape of the pressurized material W.

[0014] The pressurized object W is the object pressurized by this device 1. The pressurized object W is constructed by combining multiple electronic components. The pressurized object W includes, for example, a substrate w1, a circuit element w2, and an adhesive w3.

[0015] It should be noted that, in this invention, the pressurized object W is not limited to being constructed by combining multiple electronic components.

[0016] In the example shown in Figure 1, the substrate w1 is placed on the mounting stage 31, the circuit element w2 is disposed above the substrate w1, and the adhesive w3 is disposed between the substrate w1 and the circuit element w2. At this time, the wiring w11 of the substrate w1 is disposed below the corresponding bump w21 of the circuit element w2 and faces the bump w21.

[0017] When the pressurized object W is pressurized by the device 1, firstly, the pressure pad 25 disposed above the pressurized object W descends and comes into contact with the circuit element w2 (see Figure 1(b)). Next, the pressure pad 25 deforms to follow the shape of the pressurized object W, surrounding the sides of the substrate w1, the circuit element w2, and the adhesive w3, while pressurizing the pressurized object W. At this time, the pressurized object W is surrounded on the sides by the pressure pad 25 and is pressurized from the top and the side. In addition, the adhesive w3 is compressed, and the circuit element w2 moves closer to the substrate w1. As a result, the wiring w11 moves closer to the bump w21, and the adhesive w3 compressed between them becomes conductive. Next, the pressurized object W is heated, and the adhesive w3 is thermally cured. In this way, the circuit element w2 is pressed onto the substrate w1 by the device 1.

[0018] ●Structure of the pressurization device

[0018] Next, the structure of this device 1 will be described as follows.

[0019] Figure 2 is a schematic cross-sectional view showing an embodiment of the device 1.

[0019] Figure 3 is a partially enlarged schematic cross-sectional view of the frame member 26 of the device 1.

[0019] Figure 4 is a bottom view showing the state of the frame member 26 when viewed from below.

[0020] This device 1 pressurizes the object W to be pressurized. This device 1 includes an upper pressurizing unit 2, a lower pressurizing unit 3, a lifting mechanism (not shown in the figure; the same applies below), a vacuum pump P, and a control unit (not shown in the figure; the same applies below). The upper pressurizing unit 2 and the lower pressurizing unit 3 are examples of a pair of pressurizing units in this invention.

[0021] In the vertical direction, the upper pressurizing unit 2 and the lower pressurizing unit 3 together clamp the object to be pressurized W and pressurize it. The upper pressurizing unit 2 is positioned above the lower pressurizing unit 3. That is, in the vertical direction, the upper pressurizing unit 2 is positioned above the lower pressurizing unit 3 in a manner opposite to the lower pressurizing unit 3. The upper pressurizing unit 2 can be moved in the vertical direction by a lifting mechanism. The upper pressurizing unit 2 includes a base member 21, an upper mold 22, a side member 23, a cylinder 24, a pressure pad 25, a frame member 26, a spring member 27, and mounting bolts 28. The upper pressurizing unit 2 is one example of a pressurizing unit in this invention.

[0022] The base component 21 holds the upper mold 22, the cylinder 24, and the spring component 27. The base component 21 is held by the lifting mechanism in such a way that it can move in the vertical direction by means of the lifting mechanism.

[0023] The upper mold 22 applies pressure to the object W from above via the pressure pad 25. The upper mold 22 is disposed on the lower surface of the base member 21 and held by the base member 21. The upper mold 22 moves integrally with the base member 21. In the horizontal direction, the cross-sectional shape of the upper mold 22 is rectangular. The lower surface of the upper mold 22 is planar. The upper mold 22 has a heating mechanism inside (not shown in the figure; the same applies below). The heating mechanism heats the object W. The specific description of the heating mechanism is as follows.

[0024] It should be noted that in this invention, the upper mold 22 may not have a heating mechanism inside the upper mold 22.

[0025] The side member 23 seals the space between the upper pressurizing unit 2 and the lower pressurizing unit 3 where the pressurized object W is placed. In the horizontal direction, the side member 23 is arranged to surround the entire circumference of the sealed space (hereinafter referred to as "sealed space"). When viewed from below, the side member 23 is rectangular. That is, when viewed from below, a rectangular internal space is formed in the center of the side member 23. The side member 23 has an exhaust hole 23a that extends from the inside to the outside of the side member 23. The upper mold 22, the pressure pad 25, the frame member 26, and the spring member 27 are arranged in the internal space inside the side member 23. In the horizontal direction, the side member 23 is arranged to surround the upper mold 22, the pressure pad 25, the frame member 26, and the spring member 27. The side member 23 is held by the base member 21 by the cylinder 24. The side member 23 abuts against the mounting platform 31 described later, thereby sealing the space where the pressurized object W is mounted, thus forming a sealed space.

[0026] "Sealed space" refers to the space defined by the upper mold 22, side member 23, frame member 26, and platform 31 when the side member 23 abuts against the platform 31. Seals (not shown in the figure; the same applies below) are arranged between adjacent members to maintain the sealing of the sealed space.

[0027] The cylinder 24 is held by the base member 21 and holds the side member 23 in a liftable manner. The cylinder 24 lowers the side member 23 so that the side member 23 abuts against the mounting platform 31. The cylinder 24 is, for example, a conventional cylinder.

[0028] When the object to be pressurized W is pressurized, the pressure pad 25 deforms following the surface shape of the object to be pressurized W, and applies uniform pressure to the object to be pressurized W. The pressure pad 25 is disposed between the upper mold 22 and the stage 31. The pressure pad 25 has a flexible body 251 and two membranes 252 and 253.

[0029] When the pressurized object W is pressurized, the flexible body 251 applies uniform pressure to the pressurized object W. The flexible body 251 is disposed between the upper and lower membranes 252 and 253. The flexible body 251 is made of, for example, a conventional elastomeric material with high fluidity and low resilience modulus.

[0030] Membranes 252 and 253 hold the flexible body 251 and prevent displacement of the pressurized material W caused by the horizontal flow of the flexible body 251. Membranes 252 and 253 are, for example, conventional silicone membranes. In the horizontal direction, the ends of each of the two membranes 252 and 253 are held around the entire circumference by the frame member 26.

[0031] The pressure pad 25 constructed in this manner is held by the frame member 26 throughout the entire circumference in the horizontal direction.

[0032] The frame member 26 holds the pressure pad 25. When viewed from below, the frame member 26 is rectangular in shape. That is, when viewed from below, a rectangular internal space is formed in the center of the frame member 26. The frame member 26 has multiple holes for inserting bolts, etc. In the horizontal direction, the frame member 26 is arranged to surround the upper mold 22. The frame member 26 is held to the base member 21 by means of the spring member 27 in a manner that allows relative movement with respect to the upper mold 22 in the vertical direction. The frame member 26 is made of, for example, a conventional steel alloy. The frame member 26 has a first frame member 26a, a second frame member 26b, and a third frame member 26c. The frame member 26 has a structure that allows it to withstand horizontal pressure as a frame member 26 by combining the first frame member 26a, the second frame member 26b, and the third frame member 26c. The specific structure of the frame member 26 is described below.

[0033] In the horizontal direction, the first frame member 26a is arranged to surround the entire circumference of the pressure pad 25, holding the pressure pad 25. The first frame member 26a has three retaining members and bolts. The three retaining members of the laminate are fixed by bolts to form a first frame member 26a. The ends of the membranes 252 and 253 of the pressure pad 25 are clamped between the retaining members. As a result, the pressure pad 25 is held by the first frame member 26a. The first frame member 26a holding the pressure pad 25 constitutes a pressure pad unit.

[0034] Here, in the horizontal direction, the direction in which the pressure pad 25 is disposed relative to the first frame member 26a is the first direction, and the direction opposite to the first direction is the second direction.

[0035] The first frame member 26a has a first inner peripheral surface a1, a first outer peripheral surface a2, a first upper surface a3, and a first lower surface a4.

[0036] The first inner peripheral surface a1 faces the first direction and abuts against the flexible body 251.

[0037] The first outer peripheral surface a2 faces the second direction and abuts against the third inner peripheral surface c1, which will be described later. The first outer peripheral surface a2 is an inclined surface that is inclined in a way that protrudes towards the second direction as it moves from below to above.

[0038] The first upper surface a3 faces upward and abuts against the mounting surface b3 described later. The first upper surface a3 is a surface parallel to the horizontal direction.

[0039] The first lower surface a4 faces downward and is opposite to the mounting stage 31. The first lower surface a4 is a surface parallel to the horizontal direction. In this embodiment, the angle θ1 formed between the first outer peripheral surface a2 and the first lower surface a4 is an obtuse angle (for example, 120 degrees in this embodiment).

[0040] The second frame member 26b is a member that serves as the base of the frame member 26. The first frame member 26a is detachably mounted on the second frame member 26b. When the second frame member 26b is cut from the first direction toward the second direction, the cross-sectional shape of the second frame member 26b is approximately L-shaped. In the horizontal direction, the second frame member 26b is arranged to surround the entire circumference of the upper mold 22 and the entire circumference of the third frame member 26c. The second frame member 26b is held on the base member 21 by means of the spring member 27 in a manner that allows relative movement with respect to the upper mold 22 in the vertical direction. The second frame member 26b includes a recess b1 (see Figure 5), a protrusion b2 (see Figure 5), a mounting surface b3, a second inner peripheral surface b4, a second lower surface b5, and a second upper surface b6.

[0041] The lower portion of the second frame member 26b, on the first direction side, is recessed upwards throughout its entire circumference, forming a recess b1. The first frame member 26a and the third frame member 26c are disposed in the recess b1. The recess b1 has a mounting surface b3.

[0042] The lower portion of the second frame member 26b, on its second direction side, protrudes downward beyond the recess b1, forming a convex portion b2. That is, the convex portion b2 is disposed on the second direction side of the recess b1. In the horizontal direction, the convex portion b2 is disposed in a manner that surrounds the entire circumference of the third frame member 26c. The convex portion b2 has a second inner circumferential surface b4 and a second lower surface b5.

[0043] The mounting surface b3 faces downward and abuts against the first upper surface a3. The mounting surface b3 is a surface parallel to the horizontal direction.

[0044] The second inner peripheral surface b4 faces the first direction and abuts against the third outer peripheral surface c2, which will be described later. The second inner peripheral surface b4 is an inclined surface that protrudes towards the first direction as it moves from below to above. The second inner peripheral surface b4 is disposed on the second direction side of the mounting surface b3. That is, the mounting surface b3 is disposed on the first direction side of the second inner peripheral surface b4.

[0045] The second lower surface b5 faces downward and is opposite to the mounting stage 31. The second lower surface b5 is a surface parallel to the horizontal direction. In this embodiment, the angle θ2 formed between the second inner peripheral surface b4 and the second lower surface b5 is an obtuse angle (for example, 120 degrees in this embodiment).

[0046] A spring member 27 is mounted on the second upper surface b6, which faces upward. The second upper surface b6 is a surface parallel to the horizontal direction.

[0047] The third frame member 26c fixes the first frame member 26a to the second frame member 26b. The cross-sectional shape of the third frame member 26c in the vertical direction when the second frame member 26b is cut from the first direction toward the second direction is trapezoidal. In the horizontal direction, the third frame member 26c is arranged to surround the entire circumference of the first frame member 26a and is detachably installed on the second frame member 26b. The third frame member 26c has a third inner peripheral surface c1, a third outer peripheral surface c2, a third lower surface c3, and a third upper surface c4.

[0048] The third inner peripheral surface c1 faces the first direction and abuts against the first outer peripheral surface a2. The third inner peripheral surface c1 is an inclined surface that is inclined in a way that protrudes towards the first direction as it moves from top to bottom.

[0049] The third outer peripheral surface c2 faces the second direction and abuts against the second inner peripheral surface b4. The third outer peripheral surface c2 is an inclined surface that is inclined in a way that protrudes towards the second direction as it moves from top to bottom.

[0050] The third lower surface c3 faces downward and is parallel to the horizontal direction. The third upper surface c4 faces upward and is parallel to the horizontal direction. In the horizontal direction, the length of the third lower surface c3 is greater than the length of the third upper surface c4. That is, the cross-sectional shape of the third frame member 26c is a trapezoid that gradually tapers at the top. In this embodiment, the angle θ3 formed between the third inner peripheral surface c1 and the third lower surface c3, and the angle θ4 formed between the third outer peripheral surface c2 and the third lower surface c3, are acute angles (for example, 60 degrees in this embodiment).

[0051] Frame member 26 is constructed by combining first frame member 26a, second frame member 26b, and third frame member 26c. First frame member 26a is mounted to second frame member 26b via third frame member 26c and first mounting bolt 28a. Third frame member 26c is mounted to second frame member 26b via second mounting bolt 28b. The third inner peripheral surface c1 of third frame member 26c faces the first outer peripheral surface a2 of first frame member 26a. The entire surface of the third inner peripheral surface c1 abuts against the first outer peripheral surface a2. The third outer peripheral surface c2 of third frame member 26c faces the second inner peripheral surface b4. The entire surface of the third outer peripheral surface c2 abuts against the second inner peripheral surface b4. That is, in the horizontal direction, third frame member 26c abuts against the protrusions b2 of first frame member 26a and second frame member 26b. In other words, in the horizontal direction, the third frame member 26c abuts against the first frame member 26a and the second frame member 26b.

[0052] As described above, the cross-sectional shape of the third frame member 26c is a trapezoid that gradually tapers at the top. Therefore, when the third inner circumferential surface c1 abuts against the first outer circumferential surface a2, the third inner circumferential surface c1 holds the first outer circumferential surface a2 from below. At this time, the third inner circumferential surface c1 is in contact with the first outer circumferential surface a2. As a result, in the horizontal direction, the first frame member 26a is held by the third frame member 26c throughout its entire circumference. In addition, the first frame member 26a is pressed against the mounting surface b3 by the third frame member 26c.

[0053] In the vertical direction, the length (thickness) of the first frame member 26a is greater than the length (depth) of the recess b1 of the second frame member 26b, and the length (thickness) of the third frame member 26c is smaller than the length (depth) of the recess b1 of the second frame member 26b. The first upper surface a3 of the first frame member 26a abuts against the mounting surface b3 of the second frame member 26b. On the virtual straight line V extending from the flexible body 251 in the second direction, the length (width) of the third frame member 26c is smaller than the length (width) of the protrusion b2 of the second frame member 26b and the length (width) of the first frame member 26a.

[0054] In the vertical direction, a gap s is formed between the mounting surface b3 of the second frame member 26b and the third upper surface c4 of the third frame member 26c. This gap s is smaller than the difference between the thickness of the first frame member 26a and the thickness of the third frame member 26c. As described above, the cross-sectional shape of the third frame member 26c is a trapezoid that gradually tapers at the top. Therefore, when the third frame member 26c is pushed upward by the second mounting bolt 28b, the third inner peripheral surface c1 is in close contact with the first outer peripheral surface a2, and the third outer peripheral surface c2 is in close contact with the second inner peripheral surface b4. At this time, the first frame member 26a and the protrusion b2 are subjected to an upward force due to the third frame member 26c. As a result, the first frame member 26a is pushed upward in the first direction by the third frame member 26c and is installed (fixed) to the second frame member 26b. At this time, when the first mounting bolt 28a is loosened, the first frame member 26a is pushed horizontally (in the first or second direction) by the third frame member 26c, and the position of the first frame member 26a relative to the second frame member 26b is determined in the horizontal direction.

[0055] The force exerted on the first frame member 26a by the third frame member 26c increases as the force exerted by the second mounting bolt 28b pushing the third frame member 26c upward (i.e., the tightening force of the second mounting bolt 28b) increases. Here, assuming that no gap s is formed (when the third upper surface c4 abuts against the mounting surface b3), if the manufacturing precision of the first frame member 26a, the second frame member 26b, and the third frame member 26c is not high, this force will hardly be generated. As a result, it may hinder the tight fit between the third inner peripheral surface c1 and the first outer peripheral surface a2, and between the third outer peripheral surface c2 and the second inner peripheral surface b4 (i.e., gaps may be generated between the surfaces). In this embodiment, because gap s is formed, the second mounting bolt 28b can always push the third frame member 26c upward with a tightening force greater than a predetermined value. Therefore, the third inner circumferential surface c1 and the first outer circumferential surface a2 can always be kept in close contact, as can the third outer circumferential surface c2 and the second inner circumferential surface b4. As a result, even when the three first frame members 26a, the second frame member 26b, and the third frame member 26c are combined to form the frame member 26, the frame member 26 has a structure that can withstand high pressure in the horizontal direction.

[0056] The spring member 27 holds the frame member 26 in such a way that the frame member 26 can move relative to the upper mold 22 in the vertical direction. The spring member 27 is mounted on the lower surface of the base member 21 and the second upper surface b6 of the second frame member 26b. The spring member 27 is, for example, a conventional spring.

[0057] Mounting bolts 28 install the first frame member 26a and the third frame member 26c onto the second frame member 26b. Mounting bolts 28 include a first mounting bolt 28a and a second mounting bolt 28b. The first mounting bolt 28a installs the first frame member 26a onto the second frame member 26b, and the second mounting bolt 28b installs the third frame member 26c onto the second frame member 26b. As a result, the first frame member 26a and the third frame member 26c are fixed to the second frame member 26b.

[0058] In the vertical direction, the lower pressurizing unit 3 and the upper pressurizing unit 2 together clamp the object to be pressurized W and pressurize the object W. The lower pressurizing unit 3 is arranged below the upper pressurizing unit 2, facing it. The lower pressurizing unit 3 includes a mounting platform 31 and a lower mold 32. The lower pressurizing unit 3 is another example of a pressurizing unit in this invention.

[0059] The object to be pressurized, W, is placed on the mounting platform 31. The mounting platform 31 has an opposing surface 311 and a lower surface 312. The opposing surface 311 faces the side member 23, the pressure pad 25, and the frame member 26, and is a surface parallel to the horizontal direction. When the object to be pressurized, the mounting platform 31 is arranged below the frame member 26 and the pressure pad 25 in a manner facing them, and together with the pressure pad 25, it clamps the object to be pressurized, W. The mounting platform 31 is an example of an opposing member in this invention.

[0060] The lower mold 32 pressurizes the object to be pressurized W by means of the mounting platform 31. The lower mold 32 is disposed on the lower surface 312 of the mounting platform 31 and is placed on the ground. In the horizontal direction, the cross-sectional shape of the lower mold 32 is rectangular. The upper surface of the lower mold 32 is planar.

[0061] It should be noted that, in this invention, the lower mold 32 may also have a heating mechanism and / or a cooling mechanism inside the lower mold 32.

[0062] The lifting mechanism holds the upper pressurizing unit 2 and raises and lowers the upper pressurizing unit 2 to pressurize the object W. The lifting mechanism includes, for example, a conventional hydraulic cylinder.

[0063] It should be noted that, in this invention, the lifting mechanism may also include any mechanism capable of performing pressurization. That is, the lifting mechanism may, for example, include a conventional cylinder.

[0064] Vacuum pump P creates a vacuum in the sealed space containing the pressurized object W. Vacuum pump P is connected to exhaust port 23a via vacuum pump piping. Vacuum pump P draws air from the sealed space via vacuum pump piping and exhaust port 23a. Vacuum pump P is, for example, a conventional vacuum pump device.

[0065] The control unit controls the operation of the entire device 1. The control unit is composed of, for example, a processor such as a CPU (Central Processing Unit), volatile memory such as RAM (Random Access Memory) which functions as the operating area of ​​the CPU, and non-volatile memory such as ROM (Read Only Memory) which stores various information such as the program for controlling the device 1 or other control programs.

[0066] ● Disassembly and assembly steps of frame components

[0066] Next, the assembly and disassembly steps of the frame member 26 will be described as follows. In the following description, please refer to Figures 2 to 4 as appropriate.

[0067] Figure 5 is a partially enlarged schematic cross-sectional view showing the separated state of the first frame member 26a, the second frame member 26b, and the third frame member 26c constituting the frame member 26.

[0067] Figure 6 is a bottom view showing the state of the first frame member 26a constituting the frame member 26 as viewed from below.

[0067] Figure 7 is a bottom view showing the state of the second frame member 26b constituting the frame member 26 as viewed from below.

[0067] Figure 8 is a bottom view showing the state of the third frame member 26c that constitutes the frame member 26 when viewed from below.

[0068] The disassembly and assembly steps of the first frame member 26a, the second frame member 26b, and the third frame member 26c of the frame member 26 are performed, for example, during maintenance of this device 1, primarily for the purpose of replacing the pressure pad 25. Since the pressure pad 25 may become ineffective after thousands to tens of thousands of uses, it needs to be replaced periodically. When replacing the pressure pad 25, the third frame member 26c holding the first frame member 26a and the first frame member 26a (pressure pad unit) holding the pressure pad 25 are removed from the second frame member 26b. At this time, since the second frame member 26b is held to the base member 21 by the spring member 27, the second frame member 26b is not removed from this device 1.

[0069] Next, the disassembly steps of the frame member 26 in the disassembly and assembly steps will be explained as follows.

[0070] "Disassembly step" refers to the step of disassembling the pressure pad unit from the second frame member 26b. In the disassembly step, after disassembling the third frame member 26c from the second frame member 26b, the first frame member 26a is disassembled from the second frame member 26b.

[0071] First, a plurality of jacks (not shown in the figure; the same applies below) are arranged between the third frame member 26c and the mounting platform 31. The plurality of jacks are arranged below the third frame member 26c according to the shape of the third frame member 26c, and support the third frame member 26c from below.

[0072] Next, the second mounting bolt 28b is removed. At this time, the third frame member 26c is placed on the jack and separated from the second frame member 26b.

[0073] Next, the third frame member 26c is removed from the device 1 and taken to the outside. At this time, the third frame member 26c is removed while keeping it horizontal to avoid uneven force distribution on the third frame member 26c.

[0074] Next, the pressure pad unit is removed from the second frame member 26b. That is, the first frame member 26a is removed from the second frame member 26b. The specific details of this operation will be described below.

[0075] First, a plurality of jacks are arranged between the first frame member 26a and the mounting platform 31. The plurality of jacks are arranged below the first frame member 26a according to the shape of the first frame member 26a, and support the first frame member 26a from below.

[0076] Next, the first mounting bolt 28a is removed. At this time, the first frame member 26a is placed on the jack and separated from the second frame member 26b.

[0077] Next, the first frame member 26a is removed from the device 1 and taken to the outside. At this time, the first frame member 26a is removed while keeping it horizontal to avoid uneven distribution of force on the first frame member 26a.

[0078] Next, the installation steps of the frame member 26 in the disassembly and assembly steps of the frame member 26 will be explained as follows.

[0079] "Installation Step" refers to the step of installing the pressure pad unit onto the second frame member 26b. In the installation step, after installing the first frame member 26a onto the second frame member 26b, the third frame member 26c is installed onto the second frame member 26b. Then, the operator further tightens the first mounting bolt 28a to fix the first frame member 26a onto the second frame member 26b.

[0080] First, the pressure pad unit is installed on the second frame member 26b. That is, the first frame member 26a is installed on the second frame member 26b. At this time, multiple jacks are configured in the same manner as in the disassembly step.

[0081] Next, the first frame member 26a is moved horizontally from outside the device 1 and placed on the jack. The first frame member 26a is positioned below the mounting surface b3 of the second frame member 26b (see Figure 5).

[0082] Next, the first frame member 26a is brought into contact with the mounting surface b3 of the second frame member 26b. Then, the first frame member 26a is temporarily fixed to the second frame member 26b with the first mounting bolt 28a.

[0083] "Temporary fixation" refers to preparatory fixation performed before formal fixation. The fixing force of temporary fixation is smaller than that of formal fixation. In this embodiment, when the first frame member 26a is temporarily fixed to the second frame member 26b, the first upper surface a3 of the first frame member 26a abuts against the mounting surface b3 of the second frame member 26b. At this time, the first frame member 26a can move horizontally according to the gap between the first mounting bolt 28a and the hole.

[0084] "Formal fixation" refers to fixation performed after temporary fixation. The fixing force of formal fixation is greater than that of temporary fixation. In this embodiment, when the first frame member 26a is formally fixed to the second frame member 26b, the first upper surface a3 of the first frame member 26a abuts against the mounting surface b3 of the second frame member 26b. At this time, the first frame member 26a cannot move in the horizontal direction.

[0085] Next, the operation of installing the third frame member 26c onto the second frame member 26b is carried out. At this time, multiple jacks are configured in the same manner as in the disassembly step.

[0086] Next, the third frame member 26c is moved horizontally from outside the device 1 and placed on the jack. The third frame member 26c is positioned between the first frame member 26a and the second frame member 26b and below the mounting surface b3 (see Figure 5).

[0087] Next, the third frame member 26c is inserted between the first frame member 26a and the second frame member 26b. The third frame member 26c is close to the mounting surface b3 of the second frame member 26b.

[0088] Next, the third frame member 26c is pushed upward and fixed to the second frame member 26b by the second mounting bolt 28b. At this time, since the third inner peripheral surface c1 of the third frame member 26c, which is an inclined surface, abuts against the first outer peripheral surface a2 of the first frame member 26a, which is also an inclined surface, the first frame member 26a is pushed upward and in the first direction by the third frame member 26c. As a result, the first frame member 26a is pushed horizontally by the third frame member 26c, and the position of the first frame member 26a relative to the second frame member 26b is determined in the horizontal direction. That is, when the third frame member 26c is fixed, the third inner peripheral surface c1 is tightly fitted to the first outer peripheral surface a2, and the first frame member 26a is positioned appropriately relative to the second frame member 26b. Furthermore, when the third frame member 26c is fixed by the second mounting bolt 28b, the first frame member 26a is pushed upward and fixed to the second frame member 26b.

[0089] Next, the operator further tightens the first mounting bolt 28a, and the first frame member 26a is formally fixed to the second frame member 26b. At this time, the first upper surface a3 is tightly fitted to the mounting surface b3. In the horizontal direction, the first frame member 26a, the second frame member 26b (protrusion b2), and the third frame member 26c are tightly fitted together and become a single unit.

[0090] ● Operation of the pressurizing device

[0090] Next, the operation of this device 1 will be explained as follows. In the following explanation, please refer to FIG1 and FIG2 as appropriate.

[0091] Figure 9 is a schematic cross-sectional view showing the state in which the side member 23 abuts against the platform 31 of the lower pressure unit 3 by the lowering of the upper pressure unit 2.

[0091] Figure 10 is a schematic cross-sectional view showing the state in which the upper pressurizing unit 2 descends from the state shown in Figure 9 and pressurizes the object W by the upper mold 22 through the pressurizing pad 25.

[0092] First, the pressurized object W is placed at a predetermined position on the loading platform 31. Next, after the control unit confirms that the pressurized object W has been placed at the predetermined position, the upper pressurizing unit 2 is lowered by the lifting mechanism. After the upper pressurizing unit 2 has descended to the predetermined position relative to the loading platform 31, the control unit pauses the descent.

[0093] Next, the control unit extends the cylinder 24 and lowers only the side member 23 until it comes into contact with the opposite surface 311 of the mounting platform 31. At this time, a sealed space is formed.

[0094] Next, the control unit activates the vacuum pump P to create a vacuum in the sealed space. By creating a vacuum in the sealed space, air around the pressurized material W is removed, which can prevent malfunctions such as air ingress or air trapping when the adhesive w3 softens.

[0095] Next, with the side member 23 abutting against the mounting platform 31, the control unit lowers the upper pressure unit 2, causing the pressure pad 25 to abut against the object being pressurized W (see Figure 1(b)). Then, the control unit further lowers the upper pressure unit 2, causing the first lower surface a4 of the first frame member 26a to abut against the opposing surface 311 of the mounting platform 31. As described above, in the vertical direction, the thickness of the first frame member 26a is greater than the depth of the recess b1 of the second frame member 26b; therefore, in the frame member 26, only the first lower surface a4 abuts against the opposing surface 311 of the mounting platform 31.

[0096] Next, the control unit lowers the upper mold 22 to temporarily pressurize the object W (see Figure 10). As described above, the frame member 26 can move relative to the upper mold 22 in the vertical direction. Therefore, even if the first lower surface a4 abuts against the opposing surface 311, the upper mold 22 can be lowered only to pressurize the pressure pad 25 from above. Since the pressure pad 25 has a flexible body 251 with fluidity, it deforms according to the surface shape of the object W (see Figure 1(c)). As a result, the pressure pad 25 surrounds the upper side and the side side of the object W.

[0097] "Temporary pressurization" refers to preparatory pressurization performed before formal pressurization. The pressure applied during temporary pressurization is less than that applied during formal pressurization. In the temporary pressurization of this embodiment, a pressure is applied to the pressurized object W, causing the pressure pad 25 to deform to the extent that the surface shape of the pressurized object W is deformed.

[0098] "Formal pressurization" refers to pressurization performed after temporary pressurization. The pressure applied during formal pressurization is greater than that applied during temporary pressurization. In the formal pressurization of this embodiment, pressure is applied to the pressurized object W to the degree to which the substrate w1 and circuit element w2 in the pressurized object W are pressed together.

[0099] Next, the control unit further lowers the upper mold 22 to apply formal pressure. At this time, the flexible body 251 deforms according to the pressure applied from the upper mold 22 while applying approximately uniform pressure in all directions. As a result, the pressure pad 25 applies uniform pressure to the object W being pressurized.

[0100] Here, the effect of the pressure from the flexible body 251 on the frame member 26 is explained as follows.

[0101] Figure 11 is a partially enlarged schematic cross-sectional view showing the state under pressure as shown in Figure 10.

[0101] The hollow arrow in this figure indicates the direction of pressure.

[0102] As described above, when the pressurized object W is pressurized, the pressure pad 25 applies substantially uniform pressure in all directions by means of a flexible body 251 with high fluidity. When the pressurized object W is pressurized, the same pressure also acts on the frame member 26 that holds the pressure pad 25 in the horizontal direction.

[0103] Here, in conventional pressurization devices, the pressure pad 25 is held by a frame member (hereinafter referred to as "conventional frame member") consisting of only three stacked retaining members. The horizontal length of the conventional frame member is designed to withstand the high pressure applied from the pressure pad 25 (flexible body 251). Therefore, even if high pressure is applied from the pressure pad 25 to the conventional frame member, the conventional frame member will not deform, thus ensuring the uniformity of the pressure applied by the pressure pad 25 to the pressurized object W. On the other hand, as the required pressure of the pressurization device increases, the size of the conventional frame member increases, and the weight of the conventional frame member increases.

[0104] In this device 1, the frame member 26 is composed of three first frame members 26a, second frame members 26b, and third frame members 26c. Furthermore, the horizontal length of the first frame member 26a is designed to be smaller than that of conventional frame members. Therefore, the first frame member 26a is smaller and lighter than conventional frame members, but its pressure resistance in the horizontal direction is worse than that of conventional frame members. In this invention, since the first frame member 26a, second frame member 26b, and third frame member 26c are tightly fitted together in the horizontal direction through surface contact, the pressure resistance of the first frame member 26a is supplemented by the second frame member 26b (protrusion b2) and the third frame member 26c. As a result, the entire frame member 26 obtains pressure resistance equivalent to that of conventional frame members. That is, even if the frame member 26 is constructed by combining three first frame members 26a, second frame members 26b and third frame members 26c, the frame member 26 can withstand high pressure.

[0105] Furthermore, in conventional pressurization devices, the entire conventional frame assembly is disassembled when replacing the pressure pad 25 (pressure pad unit). On the other hand, in this device 1, the first frame assembly 26a (pressure pad unit) is disassembled after the third frame assembly 26c is disassembled. As mentioned above, the first frame assembly 26a is smaller and lighter than conventional frame assemblies, and the third frame assembly 26c is lighter than the first frame assembly 26a. Therefore, compared to the workload of conventional pressurization devices, the workload of the operator when replacing the pressure pad 25 is reduced.

[0106] Furthermore, since the first frame member 26a is more miniaturized than conventional frame members, the area of ​​the surface abutting the opposing surface 311 (the first lower surface a4 in this embodiment) is also smaller. Therefore, the precision machining of the first lower surface a4 is easier than that of conventional frame members. That is, the machining risks such as warping of the first lower surface a4 and difficulty in ensuring the machining accuracy of the first lower surface a4 are reduced when manufacturing the first frame member 26a.

[0107] Return to Figure 10.

[0107] Next, the control unit performs, for example, heat treatment on the pressurized material W while it is under formal pressure. By heating the pressurized material W, the adhesive w3 cures, and the pressurized material W is pressed together.

[0108] It should be noted that, in this invention, after the pressurized material W is heated, it may also be cooled. The heating and cooling treatments can be appropriately selected according to the characteristics of the pressurized material W.

[0109] Next, after each process is completed, the control unit ends the pressurization operation of this device 1. After the pressurization operation is completed, the pressurized material W is removed from this device 1.

[0110] Summary

[0110] According to the embodiment described above, in the horizontal direction, the frame member 26 of the device 1 for holding the pressure pad 25 is constructed by combining a first frame member 26a, a second frame member 26b, and a third frame member 26c. The first frame member 26a is arranged to surround the entire circumference of the flexible body 251, holding the flexible body 251. The first frame member 26a is detachably mounted to the second frame member 26b. In the horizontal direction, the third frame member 26c is arranged to surround the entire circumference of the first frame member 26a and is detachably mounted to the second frame member 26b, fixing the first frame member 26a to the second frame member 26b. According to this structure, since the frame member 26 can be divided, the member for holding the pressure pad 25 (the first frame member 26a in this invention) can be miniaturized compared to conventional frame members. Therefore, when replacing the pressure pad 25, the weight of the disassembled first frame member 26a is lighter than that of conventional frame members. As a result, the first frame member 26a can be easily assembled and disassembled from the device 1. Therefore, during maintenance such as replacing the pressure pad 25, the workload of the operator when assembling and disassembling the first frame member 26a can be reduced. In addition, due to the miniaturization of the first frame member 26a, the area of ​​the surface (first lower surface a4) that abuts against the mounting table 31 is also reduced, making precision machining of the abutting surface easier compared to the precision machining of conventional frame members. That is, the machining risks such as warping of the abutting surface and difficulty in ensuring the machining accuracy of the abutting surface can be reduced when manufacturing the first frame member 26a.

[0111] Furthermore, according to the embodiment described above, the second frame member 26b includes a recess b1 and a protrusion b2. The recess b1 is disposed at the end of the lower side of the second frame member 26b in a first direction, and the first frame member 26a and the third frame member 26c are disposed in the recess b1. In the horizontal direction, the protrusion b2 is disposed on the second direction side of the recess b1, and is disposed in a manner that surrounds the entire circumference of the third frame member 26c. In the horizontal direction, the third frame member 26c abuts against the first frame member 26a and the protrusion b2. According to this structure, in the horizontal direction, since the first frame member 26a, the second frame member 26b, and the third frame member 26c are closely fitted together, the pressure resistance of the first frame member 26a is supplemented by the second frame member 26b and the third frame member 26c. As a result, in the horizontal direction, the frame member 26, which is formed by combining three first frame members 26a, second frame members 26b, and third frame members 26c, can achieve the same pressure resistance as conventional frame members with the same length as the frame member 26.

[0112] Furthermore, according to the embodiment described above, in the horizontal direction, the third frame member 26c is arranged to surround the entire circumference of the first frame member 26a, and has a third inner circumferential surface c1 and a third outer circumferential surface c2. The third inner circumferential surface c1 abuts against the first outer circumferential surface a2 of the first frame member 26a. The third outer circumferential surface c2 abuts against the second inner circumferential surface b4 of the second frame member 26b. According to this structure, in the horizontal direction, since the third frame member 26c is in surface contact with the first frame member 26a and the second frame member 26b, the pressure resistance of the first frame member 26a is supplemented by the second frame member 26b (protrusion b2) and the third frame member 26c. As a result, the entire frame member 26 obtains the same pressure resistance as conventional frame members.

[0113] Furthermore, according to the embodiment described above, the third inner peripheral surface c1 of the third frame member 26c is an inclined surface that protrudes in a first direction as it moves from top to bottom. On the other hand, the first outer peripheral surface a2 of the first frame member 26a is an inclined surface that protrudes in a second direction as it moves from bottom to top. The third frame member 26c is installed on the second frame member 26b in an upwardly pressed state. According to this structure, when the third frame member 26c is fixed to the second frame member 26b, the first outer peripheral surface a2 and the third inner peripheral surface c1 are in close contact. Since the first outer peripheral surface a2 and the third inner peripheral surface c1 abut against each other by the inclined surfaces, the first outer peripheral surface a2 and the third inner peripheral surface c1 can make reliable ground contact. As a result, in the horizontal direction, since the first frame member 26a and the third frame member 26c are integrated into a structure, pressure resistance to pressure from the flexible body 251 can be obtained. According to this structure, the first frame member 26a is pushed upwards and in a first direction by the third frame member 26c. Therefore, the first frame member 26a is pushed horizontally by the third frame member 26c, and in the horizontal direction, the first frame member 26a is positioned appropriately relative to the second frame member 26b. Furthermore, when the third frame member 26c is fixed, the first frame member 26a is pushed upwards, and the first frame member 26a is fixed to the second frame member 26b.

[0114] Furthermore, according to the embodiment described above, the third outer peripheral surface c2 of the third frame member 26c is an inclined surface that protrudes in a second direction as it moves from top to bottom. On the other hand, the second inner peripheral surface b4 of the second frame member 26b is an inclined surface that protrudes in a first direction as it moves from bottom to top. According to this structure, when the third frame member 26c is fixed to the second frame member 26b, the second inner peripheral surface b4 can contact the third outer peripheral surface c2 to achieve a tight fit.

[0115] Furthermore, according to the embodiment described above, the recess b1 of the second frame member 26b has a mounting surface b3. The mounting surface b3 faces downward, and the first frame member 26a and the third frame member 26c are mounted on the second frame member 26b. The mounting surface b3 is positioned on the side closer to the first direction than the second inner peripheral surface b4. According to this structure, the first frame member 26a abuts against the mounting surface b3, thereby dispersing the pressure on the first frame member 26a from the flexible body 251 in the horizontal direction upward.

[0116] Furthermore, according to the embodiment described above, the mounting platform 31 has a facing surface 311 that faces the frame member 26 and the pressure pad 25 and is parallel to the horizontal direction. In the vertical direction, the thickness of the first frame member 26a is greater than the depth of the recess b1 of the second frame member 26b, and the thickness of the third frame member 26c is less than the depth of the recess b1. The first frame member 26a abuts against the mounting surface b3 of the second frame member 26b, and a gap s is formed between the third frame member 26c and the mounting surface b3 that is smaller than the difference between the thickness of the first frame member 26a and the thickness of the third frame member 26c. According to this structure, when the pressurized object W is pressurized, the facing surface 311 abuts only against the first frame member 26a among the first frame member 26a, the second frame member 26b, and the third frame member 26c. Therefore, compared to conventional frame members, the area of ​​the surface abutting the opposing surface 311 (first lower surface a4) can be smaller. As a result, the precision machining of the abutting surface becomes easier compared to the precision machining of conventional frame members. That is, the smaller area of ​​the abutting surface compared to conventional frame members reduces the machining risks such as warping of the first lower surface a4 and difficulty in ensuring the machining accuracy of the first lower surface a4 during the manufacture of the first frame member 26a. In addition, according to this structure, the second mounting bolt 28b, having a gap s, can always push the third frame member 26c upward with a tightening force greater than a predetermined value. Therefore, the tight fit between the third inner peripheral surface c1 and the first outer peripheral surface a2, and the tight fit between the third outer peripheral surface c2 and the second inner peripheral surface b4, can always be maintained. At this time, the first frame member 26a is pushed in the first direction and upward by the third frame member 26c. As a result, the first frame member 26a is pushed by the third frame member 26c in the horizontal direction (first direction), and is positioned appropriately relative to the second frame member 26b in the horizontal direction. When the third frame member 26c is fixed, the first frame member 26a is pushed upward, and the first frame member 26a is fixed to the second frame member 26b.

[0117] Furthermore, according to the embodiment described above, on the virtual straight line V from the flexible body 251 toward the second direction, the width of the third frame member 26c is smaller than the width of both the first frame member 26a and the protrusion b2. According to this structure, since the third frame member 26c is smaller than both the first frame member 26a and the second frame member 26b, the efficiency of assembling and disassembling the third frame member 26c can be improved during the assembly and disassembly steps of the first frame member 26a.

[0118] ●Other Implementation Forms●

[0118] It should be noted that, in this invention, the shape of the frame member 26 when viewed from below can be appropriately designed according to the shape of the object being pressed W, and is not limited to a rectangular frame. That is, for example, the shape of the frame member 26 when viewed from below can also be annular.

[0119] Furthermore, in this invention, the material of the frame member 26 is only required to maintain the pressure pad 25 and have the strength to maintain its shape under pressure, and is not limited to this embodiment. That is, the materials of the first frame member 26a, the second frame member 26b, and the third frame member 26c can each be different materials.

[0120] Furthermore, in this invention, the angle θ1 formed by the first outer peripheral surface a2 and the first lower surface a4 in the first frame member 26a is not limited to 120 degrees. That is, the angle may be, for example, more than 90 degrees and less than 135 degrees.

[0121] Furthermore, in this invention, the angle θ2 formed by the second inner peripheral surface b4 and the second lower surface b5 in the second frame member 26b is not limited to 120 degrees. That is, the angle may be, for example, more than 90 degrees and less than 135 degrees.

[0122] Furthermore, in this invention, the angle θ3 formed by the third inner peripheral surface c1 and the third lower surface c3, and the angle θ4 formed by the third outer peripheral surface c2 and the third lower surface c3, are not limited to 60 degrees. That is, each of these angles may, for example, be 45 degrees or more and 90 degrees or less. In addition, the angle θ3 formed by the third inner peripheral surface c1 and the third lower surface c3 may, for example, be an angle different from the angle θ4 formed by the third outer peripheral surface c2 and the third lower surface c3.

[0123] Furthermore, in this invention, the structure of the first frame member 26a is only required to be a structure that can hold the membranes 252 and 253, and is not limited to this embodiment.

[0124] Furthermore, in this invention, the length of the width of each of the first frame member 26a, the second frame member 26b, and the third frame member 26c in the horizontal direction can be appropriately set according to the magnitude of the pressure acting on the pressurized object W.

[0125] Furthermore, in this invention, in the vertical direction, the thickness of the first frame member 26a can also be the same as the depth of the recess b1 of the second frame member 26b.

[0126] Furthermore, in this invention, the first lower surface a4 of the first frame member 26a only needs to abut against the opposing surface 311 of the platform 31, and the second lower surface b5 of the second frame member 26b and / or the third lower surface c3 of the third frame member 26c can also abut against the opposing surface 311.

[0127] Furthermore, in this invention, the third frame member 26c can be constructed by combining multiple members, as long as it can surround the entire circumference of the first frame member 26a in the horizontal direction. That is, the third frame member 26c can also be constructed, for example, by combining four rod-shaped members into a rectangular frame.

[0128] Furthermore, in this invention, the upper mold 22 and the lower mold 32 may each have only a cooling mechanism inside the upper mold 22 and the lower mold 32, or they may have both a heating mechanism and a cooling mechanism.

[0129] Furthermore, in this invention, the lower mold 32 can also be held by a lifting mechanism different from that of the upper mold 22. According to this structure, when the lower mold 32 is held by the lifting mechanism, since the object to be pressed W can be pressurized by the up and down lifting mechanism, the device 1 can pressurize the object to be pressed W with a greater pressure.

[0130] Furthermore, in this invention, the platform 31 is only required to be capable of holding the pressurized object W and to apply pressure between the upper pressurizing unit 2 and the lower pressurizing unit 3, and is not limited to this embodiment. That is, the platform 31 may also be a transport platform for transporting the pressurized object W. In other words, the device 1 itself may not have a platform 31.

[0131] Furthermore, in this invention, the mounting bolts 28 provided in the first frame member 26a, the second frame member 26b, and the third frame member 26c, as well as the position and number of the bolts, can be appropriately selected according to the size of the frame member 26 and the pressure on the pressurized object W.

[0132] Furthermore, in this invention, as long as the tightness between the third frame member 26c and the first frame member 26a and the second frame member 26b can be ensured, a gap s can be avoided between the mounting surface b3 and the third upper surface c4.

[0133] Furthermore, in this invention, the width of the third frame member 26c is not limited to this embodiment on the virtual straight line V from the flexible body 251 toward the second direction. That is, the width may, for example, be greater than or equal to the width of the first frame member 26a and the protrusion b2.

[0134] Furthermore, in this invention, the frame member 26 can be configured to be separable into at least three first frame members 26a, second frame members 26b, and third frame members 26c, or it can be configured to be further separable. That is, the protrusion b2 can also be configured to be separable from the second frame member 26b, for example.

[0135] Furthermore, in this invention, the upper pressurizing unit 2 may function as another pressurizing unit in this invention, and the lower pressurizing unit 3 may function as one pressurizing unit in this invention. In this case, the lower pressurizing unit 3 may also include a pressurizing pad 25, and the pressurized object W may be placed on the pressurizing pad 25.

[0136] ● Embodiments of the Invention●

[0136] Next, referring to the terms and symbols described in each embodiment, the embodiments of the present invention as described above will be described below.

[0137] The first embodiment of the present invention is a pressurizing device (e.g., this device 1) that clamps and pressurizes an object to be pressurized (e.g., an object to be pressurized W) in the vertical direction. It has a pair of pressurizing units (e.g., an upper pressurizing unit 2 and a lower pressurizing unit 3) arranged opposite each other in the vertical direction to clamp and pressurize the object to be pressurized. One of the pressurizing units (e.g., the upper pressurizing unit 2) includes: a pressurizing pad (e.g., a pressurizing pad 25) having a flexible body (e.g., a flexible body 251) that deforms with respect to the surface shape of the object to be pressurized when the object to be pressurized is pressurized; and a frame member (e.g., a frame member 26) that holds the pressurized object. The aforementioned frame member comprises: a first frame member (e.g., first frame member 26a) configured in the horizontal direction to surround the entire circumference of the aforementioned flexible body and hold the aforementioned flexible body; a second frame member (e.g., second frame member 26b) for the aforementioned first frame member to be detachably mounted; and a third frame member (e.g., third frame member 26c) configured in the horizontal direction to surround the entire circumference of the aforementioned first frame member and detachably mounted to the aforementioned second frame member, thereby fixing the aforementioned first frame member to the aforementioned second frame member, and in the horizontal direction, the aforementioned third frame member abuts against the aforementioned first frame member and the aforementioned second frame member.

[0137] According to this structure, not only can the workload of operators when replacing frame components be reduced, but also the processing risks such as warping of frame components and difficulty in ensuring the processing accuracy of frame components can be reduced.

[0138] The second embodiment of the present invention is a pressurizing device as described in the first embodiment, wherein, in the horizontal direction, the direction in which the flexible body is disposed relative to the first frame member is a first direction, and the direction opposite to the first direction is a second direction; in the vertical direction, the direction in which the pressurized object is disposed relative to the pressurizing pad is a third direction (e.g., downward), and the direction opposite to the third direction is a fourth direction (e.g., upward); the second frame member includes: a recess (e.g., recess b1) disposed at the end of the first direction side of the end of the second frame member on the third direction side, for the first frame member and the third frame member to be disposed; and a protrusion (e.g., protrusion b2) disposed in the horizontal direction at a position closer to the second direction side than the recess, and disposed in a manner that surrounds the entire circumference of the third frame member; in the horizontal direction, the third frame member abuts against the first frame member and the protrusion.

[0138] According to this structure, in the horizontal direction, a frame member consisting of a first frame member, a second frame member, and a third frame member is formed, which has the same pressure resistance as a conventional frame member with the same length as the frame member.

[0139] The third embodiment of the present invention is a pressurizing device as described in the second embodiment, wherein the first frame member has a first outer peripheral surface (e.g., the first outer peripheral surface a2) facing the second direction, the protrusion is arranged in a manner that surrounds the entire circumference of the third frame member in the horizontal direction, and has a second inner peripheral surface (e.g., the second inner peripheral surface b4) facing the first direction, the third frame member is arranged in a manner that surrounds the entire circumference of the first frame member in the horizontal direction, and has: a third inner peripheral surface (e.g., the third inner peripheral surface c1) facing and abutting against the first outer peripheral surface; and a third outer peripheral surface (e.g., the third outer peripheral surface c2) facing and abutting against the second inner peripheral surface.

[0139] According to this structure, in the horizontal direction, since the third frame member abuts against the first frame member and the second frame member with its surface, the entire frame member obtains the same pressure resistance as conventional frame members.

[0140] The fourth embodiment of the present invention is a pressurizing device as described in the third embodiment, wherein the aforementioned third inner peripheral surface is an inclined surface that is inclined in a manner that protrudes toward the aforementioned first direction as it moves from the aforementioned fourth direction toward the aforementioned third direction, the aforementioned first outer peripheral surface is an inclined surface that is inclined in a manner that protrudes toward the aforementioned second direction as it moves from the aforementioned third direction toward the aforementioned fourth direction, and the aforementioned third frame member is mounted on the aforementioned second frame member in a state of being pushed toward the aforementioned fourth direction.

[0140] According to this structure, in the horizontal direction, since the first frame member and the third frame member are integrally formed, pressure resistance to pressure from the flexible body is obtained. The first frame member is disposed in an appropriate position relative to the second frame member. When the third frame member is fixed, the first frame member is pushed upward, and the first frame member is fixed to the second frame member.

[0141] The fifth embodiment of the present invention is a pressurizing device as described in the third or fourth embodiment, wherein the third outer peripheral surface is an inclined surface that is inclined in a manner that protrudes toward the second direction as it moves from the fourth direction toward the third direction, and the second inner peripheral surface is an inclined surface that is inclined in a manner that protrudes toward the first direction as it moves from the third direction toward the fourth direction.

[0141] According to this structure, when the third frame member is fixed to the second frame member, the second inner circumferential surface and the third outer circumferential surface are in close contact.

[0142] The sixth embodiment of the present invention is a pressurizing device as described in any one of the third to fifth embodiments, wherein the aforementioned recess has a mounting surface (e.g., mounting surface b3) facing the aforementioned third direction for mounting the aforementioned first frame member and the aforementioned third frame member, and the aforementioned mounting surface is disposed on the aforementioned first direction side of the aforementioned second inner peripheral surface.

[0142] According to this structure, the first frame member abuts against the mounting surface, thereby dispersing the pressure from the flexible body in the horizontal direction in the first frame member upward.

[0143] The seventh embodiment of the present invention is a pressurizing device as described in the sixth embodiment, wherein the pressurized object is placed on a counter member (e.g., a mounting platform 31). When the pressurized object is pressurized, the counter member is arranged to face the frame member and the pressurizing pad, and clamps the pressurized object together with the pressurizing pad. The counter member has a counter surface (e.g., a counter surface 311) which faces the frame member and the pressurizing pad and is parallel to the horizontal direction. In the vertical direction, the thickness of the first frame member is greater than or equal to the depth of the recess. In the vertical direction, the thickness of the third frame member is less than the depth of the recess. In the vertical direction, the first frame member abuts against the mounting surface. In the vertical direction, a gap (e.g., gap s) smaller than the difference between the thickness of the first frame member and the thickness of the third frame member is formed between the third frame member and the mounting surface.

[0143] According to this structure, the area of ​​the surface abutting the opposite surface is smaller compared to conventional frame members. In addition, the position of the first frame member relative to the second frame member is determined by the third frame member, and the first frame member is fixed to the second frame member.

[0144] The eighth embodiment of the present invention is the pressurizing device described in any one of the second to seventh embodiments, wherein the width of the third frame member is smaller than the width of the first frame member and the width of the protrusion on a virtual straight line (e.g., virtual straight line V) from the aforementioned flexible body toward the aforementioned second direction.

[0144] According to this structure, since the third frame member can be reduced in size, the efficiency of disassembling and assembling the third frame member can be improved in the disassembly and assembly steps of the first frame member.

Claims

1. A pressurizing device that clamps and pressurizes an object in a vertical direction, wherein, It has a pair of pressurizing units arranged opposite each other in the vertical direction to clamp and pressurize the aforementioned pressurized object. One of the aforementioned pressurizing units in a pair includes: A pressure pad comprising a flexible body that deforms in accordance with the surface shape of the pressurized object when the pressurized object is pressurized; and The frame components retain the aforementioned pressure pads. The aforementioned frame components include: The first frame member is configured in the horizontal direction to surround the entire circumference of the aforementioned flexible body, thereby holding the aforementioned flexible body in place. The second frame member is provided for the aforementioned first frame member to be installed in a detachable manner; as well as The third frame member is arranged horizontally to surround the entire circumference of the first frame member, and is detachably installed on the second frame member, thereby fixing the first frame member to the second frame member. In the horizontal direction, the aforementioned third frame member abuts against the aforementioned first frame member and the aforementioned second frame member.

2. The pressurizing device as described in claim 1, wherein, In the horizontal direction, the direction in which the aforementioned flexible body is disposed relative to the first frame member is designated as the first direction, and the direction opposite to the first direction is designated as the second direction. In the vertical direction, the direction in which the aforementioned pressure-bearing object is disposed relative to the aforementioned pressure pad is the third direction, and the direction opposite to the aforementioned third direction is the fourth direction. The aforementioned second frame component includes: A recess, disposed at the end of the aforementioned third-direction-side end of the aforementioned second frame member, for the aforementioned first frame member and the aforementioned third frame member to be disposed thereon; and The protrusion, in the horizontal direction, is positioned further in the second direction than the aforementioned recess, and is arranged to surround the entire circumference of the aforementioned third frame member. In the horizontal direction, the aforementioned third frame member abuts against the aforementioned first frame member and the aforementioned protrusion.

3. The pressurization device as described in claim 2, wherein, The aforementioned first frame member has a first outer peripheral surface facing the aforementioned second direction. In the horizontal direction, the aforementioned protrusion is arranged to surround the entire circumference of the aforementioned third frame member, and has a second inner peripheral surface facing the aforementioned first direction. The aforementioned third frame member is arranged horizontally to surround the entire circumference of the aforementioned first frame member, and has the following features: The third inner circumferential surface faces and abuts against the aforementioned first outer circumferential surface; and The third outer peripheral surface faces and abuts against the aforementioned second inner peripheral surface.

4. The pressurization device as described in claim 3, wherein, The aforementioned third inner circumferential surface is an inclined surface that tilts towards the aforementioned first direction as it moves from the aforementioned fourth direction toward the aforementioned third direction. The aforementioned first outer peripheral surface is an inclined surface that tilts towards the aforementioned second direction as it moves from the aforementioned third direction toward the aforementioned fourth direction. The aforementioned third frame member is installed on the aforementioned second frame member while being pushed toward the aforementioned fourth direction.

5. The pressurizing device as described in claim 4, wherein, The aforementioned third outer peripheral surface is an inclined surface that tilts towards the aforementioned second direction as it moves from the aforementioned fourth direction toward the aforementioned third direction. The aforementioned second inner circumferential surface is an inclined surface that tilts towards the aforementioned first direction as it moves from the aforementioned third direction to the aforementioned fourth direction.

6. The pressurizing device as described in any one of claims 3 to 5, wherein, The aforementioned recess has a mounting surface facing the aforementioned third direction, for mounting the aforementioned first frame member and the aforementioned third frame member. The aforementioned mounting surface is disposed on the aforementioned first direction side of the aforementioned second inner peripheral surface.

7. The pressurization device as described in claim 6, wherein, The opposing member carries the aforementioned pressurized object. When the pressurized object is pressurized, the opposing member is arranged opposite to the aforementioned frame member and the aforementioned pressure pad, and together with the aforementioned pressure pad, clamps the pressurized object. The aforementioned opposing member has an opposing surface, which faces the aforementioned frame member and the aforementioned pressure pad, and is parallel to the horizontal direction. In the vertical direction, the thickness of the aforementioned first frame member is greater than or equal to the depth of the aforementioned recess. In the vertical direction, the thickness of the aforementioned third frame member is smaller than the depth of the aforementioned recess. In the vertical direction, the aforementioned first frame member abuts against the aforementioned mounting surface. In the vertical direction, a gap is formed between the aforementioned third frame member and the aforementioned mounting surface that is smaller than the difference between the thickness of the aforementioned first frame member and the thickness of the aforementioned third frame member.

8. The pressurization device as described in claim 7, wherein, On a virtual straight line from the aforementioned flexible body toward the aforementioned second direction, the width of the aforementioned third frame member is smaller than the width of the aforementioned first frame member and the aforementioned protrusion.

Images